Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structu...

SU-8 can be patterned with high resolution, is flexible and tough. These characteristics qualify SU-8 as a material for making spotting pins for printing DNA and protein microarrays, and it can potentially replace the commonly used silicon and steel pins that are expensive, brittle in the case of silicon and can damage the substrate during the printing process. SU-8, however, accumulates large ...

in this work, ito/pet (indium tin oxide / polyethylene terephthalate) electrode structure which provides biocompatibility, mechanical stability and flexibility is fabricated. flexible ito/pet implantable electrode array for a retina has been developed. the electrode array is fabricated on a thin pet/ito substrate and is encapsulated using, su-8, an insulating material. pet substrate and su-8 po...

Microfluidics is the science and technology of systems that process or manipulate small amounts (microto picoliters) of fluids, using channels with dimensions of tens to hundreds of micrometers (Whitesides, 2006). Microfluidics offers several advantages in a variety of fields including fuel cells (Dyer, 2002; Jankowski et al., 2002; Erdler et al., 2006; Nguyen et al., 2006; Morse, 2007; Kuriyam...

The fabrication of multi-level SU-8 microstructures using multiple coating and exposure steps and a single developing step has been achieved for up to six layers of SU-8. Alternating layers of SU-8 2010 (thin) and SU-8 2100 (thick) photoresist films were spin coated, followed by soft-bake, ultraviolet (UV) exposure and post-exposure bake steps. The multiple SU-8 layers were simultaneously devel...