nanoparticles classified in 4 overall groups containing: metallic nanoparticles, ceramic nanoparticles, polymeric nanoparticles and semiconductor nanoparticles. these nanoparticles are used in some biomedical applications such as carrying medicine and photographing agents. with attention to different criteria which are both qualitative and quantitative, selecting the most suitable nanoparticles...

It is widely acknowledged that a comprehensive understanding of business processes is crucial for an effective and efficient audit of a company’s financial reporting and regulatory compliance, especially in light of the recent major financial scandals. In an attempt to improve the support of business process auditors, we conducted 17 semi-structured expert interviews to obtain deeper insights i...

Plasma etch is a complex semiconductor manufacturing process in which material is removed from the surface of a silicon wafer using a gas in plasma form. As the process etch rate cannot be measured easily during or after processing, virtual metrology is employed to predict the etch rate instantly using ancillary process variables. Virtual metrology is the prediction of metrology variables using...

The SEMATECH sponsored J-88-E project teaming Texas Instruments with NeuroDyne (et al) focused on Fault Detection and Classification (FDC) on a Lam 9600 aluminum plasma etch reactor, used in the process of semiconductor fabrication. Fault classification was accomplished by implementing a series of virtual sensor models which used data from real sensors (Lam Station sensors, Optical Emission Spe...