gyroscopes are used as rotation rate sensors. conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. micro-gyroscopes have solved these problems due to their small size. the beam micro-gyroscope is one of the popular types of inertial sensors. their small dimensions and low energy consumption are key reasons for their popul...

the static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. two engineering cases including cantilever and double cantilever micro-beam are considered. considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent euler-bernoulli beam model is used based on a modified couple stress theory, c...

Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...

The static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. Two engineering cases including cantilever and double cantilever micro-beam are considered. Considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent Euler-Bernoulli beam model is used based on a modified couple stress theory, c...

In the present work the pull-in voltage of a micro cracked cantilever beam subjected to nonlinear electrostatic pressure was studied. Two mathematical models were employed for modeling the problem: a lumped mass model and a classical beam model. The effect of crack in the lumped mass model is the reduction of the effective stiffness of the beam and in the beam model; the crack is modeled as a m...

The static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. Two engineering cases including cantilever and double cantilever micro-beam are considered. Considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent Euler-Bernoulli beam model is used based on a modified couple stress theory, c...

This paper investigates the parametric excitation of a micro-pipe conveying fluid suspended between two symmetric electrodes. Electrostatically actuated micro-pipes may become unstable when the exciting voltage is greater than the pull-in value. It is demonstrated that the parametric excitation of a micro-pipe by periodic (ac) voltages may have a stabilizing effect and permit an increase of the...