A selective epitaxial fabrication method to form piezoresistors on the sidewalls of microfabricated cantilevers for in-plane force sensing applications and their preliminary characterisation results is reported. The piezoresistors were made of a doped silicon epitaxial layer using a selective deposition technique by tailoring the process conditions. Silicon oxide was used as a mask, dichlorosil...

The silicon based pressure sensor is one of the major applications of the piezoresistive sensor. This paper focuses on the structural design and optimization of the MEMS piezoresistive pressure sensor to enhance the sensitivity. A finite element method (FEM) is adopted for designing the performance of a silicon based piezoresistive pressure sensor. Thermal as well as pressure loading on the sen...

This paper presents a design and development of a high-performance silicon piezoresistive MEMS accelerometer, with a finite element analysis (FEA) and low cross-axis sensitivity. Finite element analysis is used to simulate electro statically actuated piezoresistive accelerometer operating under dc conditions .The designs presented in this paper consist of a square shaped proof mass with flexure...

The paper reports on temperature behavior of strain sensitivity of recently introduced screen printing technology facilitating the realization of silver and carbon black piezoresistors embedded in organic coatings. Piezoresistive layers were prepared by screen printing directly on the top of the organic coating. Since no glue or carrying substrates are between the sensitive element and the devi...

Piezoresistors are commonly used in microsystems for transducing force, displacement, pressure and acceleration. Silicon piezoresistors can be fabricated using ion implantation, diffusion or epitaxy and are widely used for their low cost and electronic readout. However, the design of piezoresistive cantilevers is complicated by coupling between design parameters as well as fabrication and appli...

A compact two-dimensional micro scanner with small volume, large deflection angles and high frequency is presented and the two-dimensional laser scanning is achieved by specular reflection. To achieve large deflection angles, the micro scanner excited by a piezoelectric actuator operates in the resonance mode. The scanning frequencies and the maximum scanning angles of the two degrees of freedo...

In this paper, we describe the design, fabrication and calibration results of a 6-degree of freedom force-moment micro sensing chip utilizing the piezoresistance effect in silicon. The sensing chip is designed to be able to simultaneously detect three components of force and three components of moment in three orthogonal directions. Conventional p-type and four-terminal p-type piezoresistors ha...

A CMOS MEMS platform for gravimetric biosensing in liquid has been fabricated and tested. The concept is an aluminum and silicon dioxide membrane, coated with polystyrene and functionalized with receptors. When the protein analyte binds to the receptors, the sensor mass increases which causes a shift in the resonant frequency. The device is electrostatically actuated and the displacement is sen...

This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the impact of electrical field and reduce the temperature sensitivity of piezoresistors. The proposed se...