Synthesis by the hydrothermal method has various advantages, including low reaction temperature, three-dimensional substrate availability, and automatic polarization alignment during the process. In this review, powder synthesis, the fabrication of piezoelectric thin films, and their applications are introduced. A polycrystalline lead zirconate titanate (PZT) thin film was applied to a micro ul...

Title of Document: ORIENTATION DEPENDENCE OF THE PIEZOELECTRIC PROPERTIES OF EPITAXIAL FERROELECTRIC THIN FILMS Jun Ouyang, Doctor of Philosophy, 2005 Directed By: Professor Alexander. L. Roytburd Dept. of Materials Science and Engineering There are both intrinsic piezoelectric response and extrinsic piezoelectric response in ferroelectric materials. The intrinsic piezoelectric response is due ...

The Pb(Zr, Ti)O3 (PZT) based micro electro mechanical systems are presented. Piezoelectric effect, basic piezoelectric equations are explained. Lost silicon mold process for PZT microstructures, PZT thin film deposition, and PZT based piezoelectric micromachined switch device are discussed.

A highly-efficient, flexible piezoelectric PZT thin film nanogenerator is demonstrated using a laser lift-off (LLO) process. The PZT thin film nanogenerator harvests the highest output performance of ∼200 V and ∼150 μA·cm(-2) from regular bending motions. Furthermore, power sources generated from a PZT thin film nanogenerator, driven by slight human finger bending motions, successfully operate ...

Piezoelectric thin films offer a number of advantages in various applications, such as high energy density harvesters, a wide dynamic range, and high sensitivity sensors, as well as large displacement and low power consumption actuators. This review covers the available material forms and applications of piezoelectric thin films: lead zirconate titanate (PZT)-based thin films, lead-free piezoel...

The use of inorganic-based flexible piezoelectric thin films for biomedical applications has been actively reported due to their advantages of highly piezoelectric, pliable, slim, lightweight, and biocompatible properties. The piezoelectric thin films on plastic substrates can convert ambient mechanical energy into electric signals, even responding to tiny movements on corrugated surfaces of in...

In this paper, a new lead-free piezoelectric (K,Na)NbO3 (KNN) film is presented as a promising, environment-friendly alternative to the conventional piezoelectric thin film materials like PZT, etc. with regard to applying into piezo-MEMS devices in general and micro-energy-harvesting devices in particular. The KNN films deposited by the RF magnetron sputtering deposition system were revealed ex...

Enhancing the output power of a nanogenerator is essential in applications as a sustainable power source for wireless sensors and microelectronics. We report here a novel approach that greatly enhances piezoelectric power generation by introducing a p-type polymer layer on a piezoelectric semiconducting thin film. Holes at the film surface greatly reduce the piezoelectric potential screening ef...