nowadays, atomic force microscope is considered as a useful tool in the determination of intermolecular forces and surface topography with the resolution of nanometers. in this kind of microscope, micro cantilever is considered as the heart of the microscope and is used as a measuring tool.  this paper is aimed towards investigating the behavior of a piezoelectric micro cantilever with a triang...

The paper deals with the mechanical behavior of a micro-beam bonded with two piezoelectric layers. The micro-beam is suspended over a fixed substrate and undergoes the both piezoelectric and electrostatic actuation. The piezoelectric layers are poled through the thickness and equipped with surface electrodes. The equation governing the micro-beam deflection under electrostatic pressure is deriv...

Nowadays, atomic force microscope is considered as a useful tool in the determination of intermolecular forces and surface topography with the resolution of nanometers. In this kind of microscope, micro cantilever is considered as the heart of the microscope and is used as a measuring tool.  This paper is aimed towards investigating the behavior of a piezoelectric micro cantilever with a triang...

This paper presents a new design of mobile micro manipulation system for robotic micro assembly where a compliant piezoelectric actuator based micro gripper is designed for handling the miniature parts. The compensation of misalignment during robotic peg-in-hole assembly is achieved by this compliant micro gripper because the piezoelectric actuator has capability of producing the displacement i...

In this paper, the free vibration analysis of sandwich micro beam with piezoelectric layers based on the modified couple stress and surface elasticity theories are investigated. The Hamilton’s principle is employed to derive the sandwich micro beam with piezoelectric based on modified couple stress theory incorporating with Gurtin- Murdoch surface theory. The generalized differential quadrature...

Piezoelectric bimorphs have been used as a micro-gripper in many applications, but the system might be complex and the response performance might not have been fully characterized. In this study the dynamic characteristics of bending piezoelectric bimorphs actuators were theoretically and experimentally investigated for micro-gripping applications in terms of deflection along the length, transi...

The Pb(Zr, Ti)O3 (PZT) based micro electro mechanical systems are presented. Piezoelectric effect, basic piezoelectric equations are explained. Lost silicon mold process for PZT microstructures, PZT thin film deposition, and PZT based piezoelectric micromachined switch device are discussed.

Piezoelectric micro-jets are based on piezoelectric ink-jet technology and can achieve the drop-on demand requirements. A piezoelectric micro-jet which is designed for bearing lubrication is presented in this paper. In order to analyze the fluid dynamic characteristics of the piezoelectric micro-jet so as to obtain good injection performance, a direct coupling simulation method is proposed in t...

This paper presents the design and fabrication of a novel piezoelectric actuator for a gas micro pump with check valve having the advantages of miniature size, light weight and low power consumption. The micro pump is designed to have eight major components, namely a stainless steel upper cover layer, a piezoelectric actuator, a stainless steel diaphragm, a PDMS chamber layer, two stainless ste...

The design and fabrication of a piezoelectric micro actuator on a silicon diaphragm is presented for application of micro ink jet. We developed the micro devices for the fluid transference that are fabricated using thick film technologies for ceramic materials and Si micro-machining. The performance of drop ejection was shown from the optimal design parameters. It is closely related to the prec...