In this paper, we propose the Fuzzy Scheduling System (FSS) to deal with the dedicated machine constraint. The constraint of having a dedicated machine for photolithography process is the new issue introduced in photolithography machinery due to natural bias. If we randomly schedule the wafer lots to arbitrary photolithography machines at the first photolithography stage, then the load of all p...

Many previous works on quantum photolithography are based on maximally-entangled states (MES). In this paper, we generalize the MES quantum photolithography to the case where two light beams share a N-photon nonmaximally-entangled state. we investigate the correlations between quantum entanglement and quantum photolithography. It is shown that for nonlocal entanglement between the two light bea...

Photolithography is the most complex of the operations involved in the fabrication of a wafer, and it requires the greatest precision. Photolithography is used to create multiple layers of circuit patterns on a chip. Traditionally, wafer fab operations, and in particular, those performed in the photolithography processing area, have always presented challenging scheduling and control problems. ...

The immobilization of DNA molecules onto a solid support is a crucial step in biochip research and related applications. In this work, we report a DNA photolithography method based on photocleavage of 2-nitrobenzyl linker-modified DNA strands. These strands were subjected to ultraviolet light irradiation to generate multiple short DNA strands in a programmable manner. Coupling the toehold-media...