Achieving large motion range (> 1mm) along with nanometric motion quality (< 10nm), simultaneously, has been a key challenge in nanopositioning systems. Practical limitations associated with the individual physical components (bearing, actuators, and sensors) and their integration, particularly in the case of multi-axis systems, have restricted the range of currently available nanopositioning s...

Recent development in high-speed nanotechnology applications, such as scanning probe microscopy and nanofabrication, has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems. These systems are capable of providing motions with sub-nanometer resolution over a positioning bandwidth of a few kilohertz or more. High-speed nanopositioning devices are commonl...

A method using atomic force microscope (AFM) optical levers and a reference nanopositioning stage has been developed to characterize piezoscanner hysteresis and creep. The piezoscanner is fixed on a closed-loop nanopositioning stage, both of which have the same arrangement on each axis of the three spatial directions inside the AFM-based nanomanipulation system. In order to achieve characteriza...

Piezoelectric stack-actuated parallel-kinematic nanopositioning platforms have their first resonant mode at relatively low frequencies and also suffer from nonlinearities such as hysteresis and creep, resulting in a typically low-grade positioning performance. Closedloop control algorithms have shown the potential to eliminate these problems and achieve robust, repeatable nanopositioning. In th...

Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the ...

Accuracy is one of the most important criteria for the performance evaluation of microand nanorobots or systems. Nanopositioning stages are used to achieve the high positioning resolution and accuracy for a wide and growing scope of applications. However, their positioning accuracy and repeatability are not well known and difficult to guarantee, which induces many drawbacks for many application...

This paper focuses on the development of constitutive models, commensurate system models, and inverse compensator construction for high speed nanopositioning in atomic force microscopes (AFM). All current AFM employ either stacked or cylindrical piezoceramic actuators for both longitudinal and transverse positioning of the sample. An inherent property of these materials is the presence of hyste...

Piezoelectric nanopositioning actuators are widely employed in many applications, including the hard disk drives [1–3], gyroscopes [4] and the scanning probe microscopes [5]. Besides the precise position control, high-bandwidth tracking control is crucial for the applications of piezoelectric actuators, since, for example, it will allow hard disk drives to meet the demand for higher data storag...