This study develops a three-axis magnetic field (MF) microsensor manufactured by a complementary metal oxide semiconductor (CMOS) process. The MF microsensor contains a ring emitter, four bases, and eight collectors. Sentaurus TCAD was used to simulate the microsensor characterization. The STI (shallow trench isolation) oxide in the process was used to limit the current direction and reduce lea...

A new fiber optic microsensor has been developed for pressure measurement. The pressure microsensor is extremely small (360 micro m). Performance characteristics of the microsensor were evaluated over a pressure range from 0 to 250mmHg. Five sensors were compared to a National Institute of Standards and Technology traceable reference pressure. The microsensor had an accuracy, repeatability, and...

An ionophore-doped sensing membrane phosphate (PO4) microsensor based on bis(dibromophenylstannyl)methane (Bis microsensor) is described. The Bis microsensor showed a Nernstian response. The response of the Bis microsensor was log-linear down to a monohydrogen phosphate ion (HPO42-) concentration of 0.5 μM (corresponding to 1.0 μM of orthophosphate at pH 7.2), whereas the detection limit of PO4...

the construction and performance of an amperometric microbiosensor for the determination of choline chloride by immobilizing choline oxidase on a cellulose acetate membrane are described. the procedure of choline determination involved the electrochemical detection of enzymatically generated hydrogen peroxide. this microsensor has a linear response between 0.038-0.1 mm choline chloride. the res...

The construction and performance of an amperometric microbiosensor for the determination of choline chloride by immobilizing choline oxidase on a cellulose acetate membrane are described. The procedure of choline determination involved the electrochemical detection of enzymatically generated hydrogen peroxide. This microsensor has a linear response between 0.038-0.1 mM choline chloride. The...

This study developed portable, non-invasive flexible humidity and temperature microsensors and an in situ wireless sensing system for a proton exchange membrane fuel cell (PEMFC). The system integrated three parts: a flexible capacitive humidity microsensor, a flexible resistive temperature microsensor, and a radio frequency (RF) module for signal transmission. The results show that the capacit...

Current wireless microsensor network systems with low energy and cost have provided extended capabilities for manufacturing, environmental monitoring, transportation, biomedical care, and security and safety. Because of their miniaturized size, however, microsensors have serious energy constraints and limited computing power. Therefore, microsensor network systems require constraint specific co...

The microsensor technology was used here to identify the initiation time of an impact shock. The shock excitation caused by an impact sphere with a diameter of 4-6 minimeters could generate transient elastic waves in concrete structures. Such elastic waves with frequency above 100 kHz are the active emission sources for defect detection in the non-destructive testing (NDT) of concrete using tra...

This paper presents design and characterization of a microaccelerometer designated for integration into cataract surgical probe to detect hardness of different eye tissues during cataract surgery. Soft posterior lens capsule of eye can be easily damaged in comparison with hard opaque lens since the surgeon can not see directly behind cutting needle during the surgery. Presence of microsensor he...

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...