Hexapod locomotive Micro-Electro Mechanical Systems (MEMS) microrobot with Pulse-type Hardware Neural Networks (P-HNN) locomotion controlling system is presented in this chapter. MEMS microrobot is less than 5 mm width, length, and height in size. MEMS microrobot is made from a silicon wafer fabricated by micro fabrication technology to realize the small size mechanical components. The mechanic...

A novel scalable strategy for open loop control of ferromagnetic microrobots on a plane using a scalable array of electromagnets is presented. Instead of controlling the microrobot directly, we create equilibrium points in the magnetic force field that are stable and attractive on the plane in which the microrobot is to be controlled. The microrobot moves into these equilibrium points rapidly i...

A two degree-of-freedom microrobot is designed in the Berkeley 3-layer SOI/DRIE process. The microrobot uses electrostatic actuation to minimize power consumption. To create out-of-plane motion, which translates to lateral movement for the robot, a variation on a torsional resonator is used. For inplane motion, the microrobot uses a simple electrostatic gap-closing actuator to pivot the microro...

This paper researches the design and control method of a microrobot in a microfluidic system by electromagnetic field. The microrobot can move along the microchannel to a required position, and by changing the magnetic torque, the microrobot can also rotate in the microfluidic chip. As an application of the microrobot, it is used as a mobile micromixer to mix two solutions in the microfluidic c...

0957-4158/$ see front matter 2010 Elsevier Ltd. A doi:10.1016/j.mechatronics.2010.09.001 ⇑ Corresponding author. ⇑⇑ Corresponding author. E-mail addresses: jop@jnu.ac.kr (J. Park), spark@jn Various electromagnetic based actuation (EMA) methods have been proposed for the actuation of microrobots. The advantage of EMA is that it can generate a wireless driving force for the microrobot, and this i...

Recently, wireless controlled microrobots have been studied because of their great development prospects in the biomedical field. Electromagnetic microrobots have the advantages of control agility and good precision, and thus, have received much attention. Most of the control methods for controlling a magnetic microrobot use manual operation. Compared to the manual method, the automatic method ...

In this paper, we propose a hybrid microrobot concept to increase dynamic efficiency and adapt these systems for use in various working environments. The microrobot consists of a head capable of spiral motion, legs capable of paddling motion, and fish-like fins. We developed a prototype with a rotatable head and a body that has legs and fins. Additionally, we developed a control system and carr...

A modular mobile self‐reconfigurable microrobot is developed to enlarge the whole surveillance range of mobile microrobot. The microrobot is designed as differential driven vehicle equipped with a passive universal connector with autonomic engagement/disengagement function, and actuated by MEMS‐based electromagnetic micromotors. To realize that the microrobot is autonomous, its electr...

This paper presents the ultrahigh speed microrobot actuation for cell manipulations in a microfluidic chip. The Ni and Si composite fabrication was employed to form the optimum riblet shape to reduce fluid friction on the microrobot by anisotropic Si wet etching and deep reactive ion etching. The evaluation experiments show the effectiveness of the riblet surface, especially in the case of high...

Segmented myriapod-like bodies may offer performance benefits over more common fixed body morphologies for ambulation. Here, the design of a segmented ambulatory microrobot with a flexible backbone is presented. A dynamic model describing the motion of the microrobot is used to determine body parameters. A three-segment microrobot was fabricated using the Smart Composite Microstructures process...