We designed and fabricated a micromirror with sidewall electrodes in the Cornell NanoScale Science & Technology Facility (CNF) for endoscopic application. The micromirror can perform 2-dimensional scanning. The static and dynamic performances of the micromirror are improved over that of a micromirror without sidewall electrodes. In addition, undesired spring-softening effect that is commonly fo...

−This paper presents the design, fabrication and characterization of a 32 by 32 electroplated micromirror array on a glass, a low cost substrate. Approaches taken in this work for the fabrication of micromachined mirror arrays include a line addressing scheme, a seamless array design for high fill factor, planarization techniques of polymeric interlayers, a high yield methodology for the remova...

In this study we used the commercial 0.35 μm CMOS (complementary metal oxide semiconductor) process and simple maskless post-processing to fabricate an array of micromirrors exhibiting high natural frequency. The micromirrors were manufactured from aluminum; the sacrificial layer was silicon dioxide. Because we fabricated the micromirror arrays using the standard CMOS process, they have the pot...

We present the design, fabrication and measurement results of a comb-driven electrostatic scanning micromirror. Instead of a conventional micromirror having uniform thickness across the entire reflective surface, a diaphragm mirror plate supported by an array of diamond-shaped frame structures is fabricated monolithically. The fabrication process is a simple sequence of silicon deep etch proces...

The thermal damping of a dynamic vibrating micromirror is an important factor affecting the design of MEMS based actuator systems. In the development process of new micromirror systems, assessing the extent of energy loss due to thermal damping accurately and predicting the performance of the system is very essential. In this paper, the depth of the thermal penetration layer at different eigenf...

The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely employed in different areas, such as scanning, imaging and optical switching. This paper studies the MEMS electromagnetic micromirror for scanning or imaging application. In these application scenarios, the micromirror is required to track the command sinusoidal signal, which can be converted to an output regu...

We describe a setup for addressable optical trapping in which a laser source is focused on a digital micromirror device and generates an optical trap in a microfluidic cell. In this paper, we report a proof-of-principle single beam/single micromirror/single three-dimensional trap arrangement that should serve as the basis for a multiple-trap instrument.

An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance. key words: mi...

This paper presents a system-level model of microsystem architecture deploying cooperating microactuators. An assembly piezoelectric kick-actuator and an electromagnetic catch-actuator manipulates structurally unconnected, magnetized micromirror. The absence mechanical connections allows for large deflections multistability. Closed-loop feedback control this setup to achieve high accuracy, but ...