A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is described, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator with the intent of achieving high stability. The operation and performance of micromechanical resonators are modeled, with emphasis on circuit and noise modeling of multiport r...

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is described, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator with the intent of achieving high stability. The operation and performance of micromechanical resonators are modeled, with emphasis on circuit and noise modeling of multiport r...

The electromechanical coupling factors (ηe’s) of capacitively-transduced micromechanical resonators have been increased by a factor of 8.1× via a process technology that utilizes atomic layer deposition (ALD) to partially fill the electrode-toresonator gaps of released resonators with high-k dielectric material and thereby achieve effective electrode-to-resonator gap spacings as small as 32 nm....

A micromechanical, laterally vibrating disk resonator, fabricated via a technology that combines polysilicon surface-micromachining and metal electroplating to attain submicron lateral capacitive gaps, has been demonstrated at frequencies approaching 160 MHz with Q's as high as 9,400— the highest demonstrated to date for an on-chip resonator in this frequency range. This frequency also represen...

We analyze the quantum dynamics of a micromechanical resonator capacitively coupled to a Cooper-pair box. With appropriate quantum state control of the Cooper box, the resonator can be driven into a superposition of spatially separated states. The Cooper box can also be used to probe the decay of the resonator superposition state due to environmental decoherence.

A 10-MHz series resonant micromechanical resonator oscil-lator has been demonstrated using a custom-designed, single-stage, zero-phase-shift sustaining amplifier together with a clamped-clamped beam micromechanical resonator, designed with a relatively large width of 40 µm to achieve substantially lower series motional resistance R x and higher power handling than previous such devices. Using a...

A topology optimization problem in micromechanical resonator design is addressed in this paper. The design goal is to control the first several eigenfrequencies of a micromechanical resonator using topology optimization. The design variable is the distribution of mass in a constrained domain which we model via (1) the Simple Isotropic Material with Penalization Model and (2) the Peak Function M...

A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is described, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator to achieve stability and phase noise performance comparable to those of quartz crystal oscillators. It is shown that the closed-loop, steady-state oscillation amplitude of this...

Fully monolithic, high-Q, micromechanical signal processors are described. A completely monolithic high-Q oscillator, fabricated via a combined CMOS plus surface micromachining technology, is detailed, for which the oscillation frequency is controlled by a polysilicon micromechanical resonator to achieve high stability. The operation and performance of μmechanical resonators are modelled, with ...

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