The construction of a new generation of MEMS which includes micro-assembly steps in the current microfabrication process is a big challenge. It is necessary to develop new production means named micromanufacturing systems in order to perform these new assembly steps. The classical approach called “top-down” which consists in a functional analysis and a definition of the tasks sequences is insuf...

Despite remarkable progress made in recent years, producing freeform three-dimensional micro-components out of copper, silver or gold and their alloys remains an engineering challenge: current processes are either too slow to be economically viable, produce porous otherwise imperfect metal microstructures. Here we introduce alternative, faster approach for the fabrication amenable processing no...

This chapter focuses on metrology, sensors and controls for micromanufacturing. In general, a variety of sensors are employed in micromanufacturing. Many of them are used for metrology, and in particular dimensional metrology. Most are used on production machines to provide feedback during production. Few metrology systems for process and product control are available. The sensors and metrology...

Directly 3D-printed metal microstructures could enable hybrid micromanufacturing, combining conventional micromanufacturing with additive (µAM). The microstructure’s material properties, including the electrical resistivity, are of decisive importance for a wide range applications in microelectronics, high-frequency communication, and biomedical engineering. In this work, we present room-temper...

Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fu...

Microfluidic devices play a continuous increasing role in the drugs and nanomedicine production delivery diagnostic kits. Three main classes of materials are employed manufacturing microfluidic devices: mainly polymers, metals glasses. The mass is normally based on micro-injection molding PDMS but there cases that discourage use such as when incompatible solvents must be used drug formulation. ...