This paper presents the analysis, design, and characterization of a superelastic alloy (NiTi) microgripper with integrated electromagnetic actuators and piezoelectric force sensors. The microgripper, fabricated by electro-discharge machining, features force sensing capability, large force output, and large displacements to accommodate objects of various sizes. The design parameters for the embe...

In this work, we report a new design for an electrostatically actuated microgripper with a post-assembly self-locking mechanism. The microgripper arms are driven by rotary comb actuators, enabling the microgripper to grip objects of any size from 0 to 100 μm. The post-assembly mechanism is driven by elastic deformation energy and static electricity to produce self-locking and releasing actions....

Design, fabrication and tests of a monolithic compliant-flexure-based microgripper were performed. The geometry design and the material tresses were considered through the finite element analysis. The simulation model was used to study in detail profiles of von Mises stresses nd deformation. The maximum stress in the microgripper is much smaller than the critical stress values for fatigue. The ...

This paper deals with the modeling and control of a microgripper devoted to micromanipulation and microassembly applications and tasks. Based on two collaborative piezoelectric actuators, the microgripper is typified by a high sensitivity to the environment, in particular a high sensitivity to the properties of the manipulated objects. This sensitivity makes the behavior of the microgripper var...

A new design for a polymeric microgripper was developed. Two microgrippers with different dimensions were considered. An evaluation between these models was performed using the simulation results. Finite-element analyses of the microgripper, using COVENTORWARE, are performed in order to evaluate the relation between the displacement, temperatures and the electrical current passing through the m...

In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devices. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is computationally less extensive and low cost. System level simulations are based on equivalent behavioral mode...

A remotely controlled microgripper has been developed as an end-eeector for a six-degree-of-freedom force-reeecting motion-scaling system. The microgrip-per is small and lightweight, and features relatively high force and stroke compared to other designs. Furthermore , force sensing enables the accurate measurement and control of tool-tissue forces, and the em-ulation of diierent mechanical dev...

As mechanical end-effectors, microgrippers enable the pick–transport–place of micrometer-sized objects, such as manipulation and positioning of biological cells in an aqueous environment. This paper reports on a monolithic MEMS-based microgripper with integrated force feedback along two axes and presents the first demonstration of forcecontrolled micro-grasping at the nanonewton force level. Th...

The Fourier Transform (FTIR) microspectrometer discussed in this paper is an example of a complex Micro-OptoElectro-Mechanical System (MOEMS) configured as an optical bench on a chip. It is an important benchmark application for microtechnology due to increased demands for the use of miniature wavelength detection instruments in bio, nano and material science. This device can be manufactured us...

This paper presents a topological-optimization method which applies the theory of ground structure parameterization to design and analyzes a microgripper device. The study defines the compliant design domain as 2000μm×2000μm with a 200μm thickness, and discusses the effect of different optimization parameters. The driver is an electro-thermal microactuator that can actuate approximately 6000μN ...