Perovskite BaTiO3 thin films have a wide range of applications for advanced devices. Especially, epitaxial BaTiO3 thin films are highly desirable for these advanced applications. So far, such epitaxial BaTiO3 films have been successfully fabricated on different single-crystal substrates using various deposition techniques including RF magnetron sputtering, molecular beam epitaxy, metallorganic ...

Uniform epitaxial CoSi2 layers have been grown in situ on a ~100! Si substrate at temperatures above 600 °C by reactive chemical-vapor deposition of cyclopentadienyl dicarbonyl cobalt, Co~h-C5H5!~CO!2 . Co-rich phases such as Co2Si and CoSi were suppressed during cobalt metallorganic chemical-vapor deposition at substrate temperatures above 500 °C. A thin carbon layer was found on the top of th...

Thin films of tungsten nitride were deposited from Cl4(CH3CN!W~N Pr) by metallorganic chemical vapor deposition ~MOCVD! in the presence and absence of ammonia (NH3) coreactant. Films were analyzed by X-ray diffraction, Auger electron spectroscopy, and X-ray photoelectron spectroscopy ~XPS!. Films grown with NH3 had increased nitrogen levels and decreased carbon and oxygen levels relative to fil...

nanoporous graphene which is used as nanosorbent was synthesized by chemical vapor deposition method via porous zinc oxide nanocatalyst. the reaction was carried out using methane as the carbon source and hydrogen as the carrier gas in a ratio of 4:1 at the temperature ranging 900-1050°c for 2-50 min. the product was characterized by scanning electron microscopy, transmission electron microscop...