micro-electro-mechanical systems (mems) are combination of electrical and mechanical components in micron dimensions. in recent years, holding, actuating methods and handling of mems components such asmicrogripper, microsensors and etc. have been deeply studied. microgrippers for handling, positioning andassembling of micro components are very useful so that for clamping need actuation created ...

We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and ...

By using a CMOS compatible process technology, a MEMS variable optical attenuator (VOA) is characterized in terms of actuation mechanisms. A dual-fiber collimator is aligned perpendicularly to the micromirror in a three-dimensional (3D) free space configuration, where the micromirror is mechanically connected with an electromagnetic actuator and two sets of electrothermal actuators. Three types...

Actuator materials can directly convert different types of energy into mechanical energy. In this work, we designed and fabricated electrothermal air pump-type actuators by utilization of various nanostructured carbon materials, including single wall carbon nanotubes (SWCNTs), reduced graphene oxide (r-GO), and graphene oxide (GO)/SWCNT hybrid films as heating elements to transfer electrical st...

Title of Dissertation: DESIGN AND FABRICATION OF ELECTROTHERMAL MICROMOTORS AND COMPLIANT MECHANISMS FOR SPATIAL PARALLEL MICROMANIPULATORS Wei-Jen Cheng, Doctor of Philosophy, 2005 Directed By: Associate Professor Don DeVoe Department of Mechanical Engineering In this dissertation a new class of spatial micromechanisms employing compliant joints and electrothermal motors has been developed. Th...

We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combiniig numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and ...

In this paper we examine the suitability of SU-8 2000 as a construction material for electrothermal actuators and the actuator stability for long-term operation. The fabrication of SU-8 was optimized for mechanical and thermal stability. Samples with different softbake duration, exposure dose and postbake temperature were evaluated using Fourier-Transform IR-spectroscopy and dynamic-mechanical ...

An iris-type variable aperture fabricated using microelectromechanical systems (MEMS) technology is described. The device contains four shutter blades, which are each driven by a separate actuator and translated synchronously to create a square aperture. Devices based on buckling mode electrothermal actuators and formed by deep reactive ion etching of bonded silicon-on-insulator are demonstrate...