this article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. the electrostatic actuation was induced by applying ac-dc voltage between the microbeam and electrode plate. in contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. in additio...

This article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. The electrostatic actuation was induced by applying AC-DC voltage between the microbeam and electrode plate. In contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. In additio...

-In this paper, piezoelectric actuation is compared with electrostatic actuation for application in RF-MEMS switches with respect to actuation voltage and technological implementation. The expression for the actuation voltages of electrostatic and piezoelectric actuation are discussed and compared with respect to scaling. Calculation examples show actuation voltages for a cantilever beam of 1μm...

Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of the existing techniques applied to the Micro-Electro-Mechanical Systems (MEMS) electrostatic actuation modeling and their implications to t...

Dip pen nanolithography (DPN) is a method of creating nanoscale chemical patterns on surfaces using an atomic force microscope (AFM) probe. Until now, efforts to increase the process throughput have focused on passive multi-probe arrays and active arrays based on thermal bimetallic actuation. This paper describes the first use of electrostatic actuation to create an active DPN probe array. Elec...

Microvalves are critical in the operation of integrated microfluidic chips for a wide range of applications. In this paper, we present an analytical model to guide the design of electrostatic microvalves that can be integrated into microfluidic chips using standard fabrication processes and can reliably operate at low actuation potentials (<250 V). Based on the analytical model, we identify des...

The aim of this paper is to propose a complete normalized study of a diaphragm's behavior under classical excitation encountered in microsystem: pneumatic, electrostatic, piezoelectric and magnetic. The principle of modeling is widely described in order to be easily applied to other structure. First, a traditional analytical solution is recalled for the diaphragm's deflection based on energy mi...

in this paper, the stability of a functionally graded magneto-electro-elastic (fg-mee) micro-beam under actuation of electrostatic pressure is studied. for this purpose euler-bernoulli beam theory and constitutive relations for magneto-electro-elastic (mee) materials have been used. we have supposed that material properties vary exponentially along the thickness direction of the micro-beam. gov...

This work reports on the modelling of, and experiments on, a method in which liquid is transported as droplets on a planar hydrophobic surface with no moving parts, merely through electrostatic forces generated by the underlying electrodes. Two-directional transportation along a straight electrode path and across a junction, fusion of two droplets and methods for importing, exporting and filter...