this article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. the electrostatic actuation was induced by applying ac-dc voltage between the microbeam and electrode plate. in contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. in additio...

This article studied static deflection, natural frequency and nonlinear vibration of a clamped-clamped microbeam under discontinues electrostatic actuation. The electrostatic actuation was induced by applying AC-DC voltage between the microbeam and electrode plate. In contrast to previous works, it was assumed that length of the electrode plate was smaller than that of the microbeam. In additio...

This paper proposes a ramp dual-pulse actuation-voltage waveform that reduces actuation-voltage shift in capacitive microelectromechanical system (MEMS) switches. The proposed waveform as well as two reported waveforms (dual pulse, and novel dual-pulse) are analyzed using equivalent-circuit and equation models. Based on the analysis outcome, the paper provides a clear understanding of trapped c...

RF MEMS switches can be used to achieve reconfigurability of various RF systems and in particularly for miniaturized antenna structures. In case of micro machined antennas, which involve low voltage signals, RF MEMS switches with low actuation voltage are required for achieving reconfigurability. The capacitive shunt switch derives its switching property from the significant difference of its c...

A MEMS varactor using torsional beams for actuation is proposed. Analytical expression for electrostatic torque developed is derived. The structure is compared with existing structures for dynamic range and actuation voltage. It is demonstrated that the proposed varactor outperforms the other structures in terms of wide dynamic range and lower actuation voltage, coupled with ease of fabrication...

-In this paper, piezoelectric actuation is compared with electrostatic actuation for application in RF-MEMS switches with respect to actuation voltage and technological implementation. The expression for the actuation voltages of electrostatic and piezoelectric actuation are discussed and compared with respect to scaling. Calculation examples show actuation voltages for a cantilever beam of 1μm...

A dielectric elastomer transducer is a deformable capacitor, and is under development as a sensor, actuator, or generator. Among various geometric configurations, laterallyconstrained transducer, also known as pure-shear transducer, is easy to implement and effective to couple mechanical force and electrical voltage. This analytical study reveals that lateral pre-stretch enhances actuation, far...

In this paper, the dynamic response of resonating nano-beams is investigated using a strain gradient elasticity theory. A nonlinear model is obtained based on the Galerkin decomposition method to find the dynamic response of the investigated beam around its statically deflected position. The mid-plane stretching, axial residual stress and nonlinear interaction due to the electrostatic force on ...

Abstract—A novel dual-pulse actuation voltage has been proposed to reduce dielectric charging in micro-electromechanical system (MEMS) switch, leading to a longer switch lifetime. Mathematical and transient circuit models have been utilized to simulate dielectric charging in the RF MEMS switch, enabling the analysis of charge built-up at the switch dielectric and substrate brought about by the ...

the present research attempts to explain dynamic pull-in instability of functionally graded micro-cantilevers actuated by step dc voltage while the fringing-field effect is taken into account in the vibrational equation of motion. by employing modern asymptotic approach namely homotopy perturbation method with an auxiliary term, high-order frequency-amplitude relation is obtained, then the infl...