In this paper we have investigated the temperature dependence of the charging effects in Metal-Insulator-Metal structures, aiming to obtain a better insight on the charging mechanism of RF-MEMS switch insulating layer. The accumulated charge kinetics have been monitored through the transient response of the depolarization current. The transient response is shown to follow rather a stretched exp...

Final version, submitted to the International Conference on Radiation Effects on Semiconductor Materials, Detectors and Devices, held at the Universita’ di Firenze, Italy, March 6-8, 1996, to be published in NIM Abstract We present thermally stimulated current (TSC) spectra measured on asymmetric p-n-junctions fabricated from detector grade silicon. A multitude of characteristic deep levels gen...

Thermally-stimulated-current (TSC} technique consists of heating a dielectric, with excess carriers having been introduced. The current flowing under the effect of applied electric field is then recorded as a function of increasing temperature. The current maximum obtained is called a "transport TSC peak" if it appears due to thermally activated transport of carriers initially generated at one ...