The mobile device’s limited thermal budget hardly allows the use of a high-performance application (AP) at its full speed. However, as artificial intelligence technologies has been rapidly applied for devices, demand like high-speed and large-capacity signal processing is continuously increasing. Therefore, controlling heat generation AP chip becoming key factor, it necessary to develop Re-Dist...

The processes of modifying the structural and optical properties FP9120 S1813 diazoquinone–novolac photoresist films on single-crystal silicon wafers beyond range ions by implantation light B+, P+ heavy Sb+ have been studied using techniques attenuated total reflection Fourier-transform IR spectroscopy, indentation, measurement spectra. It has shown that during B+ ions, involving photosensitive...

The high chemical stability of SU-8 makes it irreplaceable for a wide range applications, most notably as lithography photoresist micro and nanotechnology. This advantage becomes problem when there is need to remove from the fabricated devices. Researchers have been struggling two decades with this problem, although number partial solutions found, difficulty has limited applications SU-8. Here ...

Abstract Due to the precision and sizing requirements of popular semiconductor devices nowadays, thickness control uniformity optimization photoresist during photolithography process are thought be critical issues for engineers consider. In this paper, parameters affecting thoroughly analyzed an economic novel approach improving spin coating is presented. Integrated Nanosystems Research Facilit...

Hydrogen silsesquioxane (HSQ) photoresist has shown extremely high-resolution performance for electron-beam lithography and interference can be a potential candidate for...

This paper presents microlenses for integration on a stereoscopic image sensor in CMOS technology for use in biomedical devices. It is intended to provide an image sensor with a stereoscopic vision. An array of microlenses potentiates stereoscopic vision and maximizes the color fidelity. An array of optical filters tuned at the primary colors will enable a multicolor usage. The material selecte...