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Third-order, high-Q, micromechanical bandpass filters comprised of three ratioed folded-beam resonators coupled by flexural mode springs are demonstrated using an integrated circuit compatible, doped polycrystalline silicon surfacemicromachining technology. A complete design procedure for multiresonator micromechanical filters is presented and solidified via an example design. The use of quarte...

Frequency tunable comb resonators have been successfully designed and demonstrated based on a closed-form approach of a curved comb finger contour. Experimentally, the resonant frequency of a laterally driven comb resonator with 186 pairs of curved finger contour has been reduced by 55% from the initial frequency of 19 kHz under a bias voltage of 150 V. The corresponding effective stiffness has...

In this paper we report on a multi-resonant transducer that may be used to replace a traditional speech processor in cochlear implant applications. The transducer, made from an array of micro-machined polymer resonators, is capable of passively splitting sound into its frequency sub-bands without the need for analog-to-digital conversion and subsequent digital processing. Since all bands are me...

The response of a coupled array of nonlinear oscillators to parametric excitation is calculated in the weak nonlinear limit using secular perturbation theory. Exact results for small arrays of oscillators are used to guide the analysis of the numerical integration of the model equations of motion for large arrays. The results provide a qualitative explanation for a recent experiment @Buks and R...

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Self-limiting 46.4-MHz series resonant reference oscillators employing a wine-glass mode disk micromechanical resonator to avoid hard limiting without the need for ALC have achieved measured phase noises of -113 and -134 dBc/Hz at 1kHz and far-fromcarrier offsets, respectively. When divided down to 10MHz frequency for fair comparison with other oscillators, these values correspond to -126 dBc/H...

The rapid layout synthesis of a microresonator from high-level functional specifications and design constraints is demonstrated. Functional parameters such as resonant frequency, quality factor, and displacement amplitude at resonance are satisfied while simultaneously minimizing an objective function. The optimal synthesis tool allows exploration of micromechanical design issues and objectives...

We demonstrate piezoresistive transduction of mechanical motion from out-of-plane flexural micromechanical resonators made from stacked thin films. The resonators are fabricated from two highly doped polycrystalline silicon layers separated by an interlayer dielectric. We examine two interlayer materials: thermal silicon dioxide and stoichiometric silicon nitride. We show that via one-time diel...