Future of analytical and manufacturing methods based on micro-mechanical cantilevers, depends critically on the ability to implement parallel operation and fast signal processing [1]. There are two mean reasons: high throughput requirement and complexity (multidimensionality) of analyzed value. In order to get parallel function, any single device should be simultaneously: recognizable, autonomo...

The atomic force microscope (AFM) has become an essential tool for imaging the surface topography of conductors and insulators on a microand nanoscale level [1]. In addition, AFM has also been powerful in nanomachining [2]. Cracks may occur in the AFM cantilever during the nanomachining experiments or in the fabrication of cantilever. The cantilever with cracks will affect its performance in us...

The atomic force microscope (AFM) has become an essential tool for the measurement of surface characteristics of diverse materials on a microand nanoscale level [1]. The resolution of measurements for the AFM cantilever is related to its vibration sensitivity. Many researchers have much interest in studying the resonant frequency and sensitivity analysis of AFM cantilevers [2 4]. Cracks may be ...

This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in effect can be shifted beyond one third of the initial gap and even be eliminated when electrostatic actuators are operated in liquids. This should benefit to applications in micro...

Vibrating micro- and nanomechanical mass sensors are capable of quantitatively determining attached mass from only the first three (two) measured cantilever (suspended) resonant frequencies. However, in aqueous solutions that are relevant to most biological systems, the mass determination is challenging because the quality factor (Q-factor) due to fluid damping decreases and, as a result, usual...

This paper demonstrates that it is possible to trap and release a super paramagnetic micro bead by fixing three super paramagnetic micro beads in a triangular array at the sensitive end of a micro cantilever, and by simply switching on/off an external magnetic field. To provide evidence of this principle we trap a micro bead that is attached to the free end of single DNA molecule and that has b...

Power supply is a bottle-neck problem of wireless micro-sensors, especially where the replacement of batteries is impossible or inconvenient. Now piezoelectric material is being used to harvest vibration energy for self-powered sensors. However, the geometry of a piezoelectric cantilever beam will greatly affect its vibration energy harvesting ability. This paper deduces a remarkably precise an...

The mechanical properties of biological tissue describe its behavior under pressure or force. These intrinsic tissue properties can often be related to function. For instance, the spine provides strength and structural support and the ribcage and skull offer protection for delicate internal organs such as the lungs and the brain. On a smaller scale, it has been shown that cells and tissues feel...

A method suitable for the calibration of the spring constants of all torsional and lateral eigenmodes of micro- and nanocantilever sensors is described. Such sensors enable nanomechanical measurements and the characterization of nanomaterials, for example with atomic force microscopy. The method presented involves the interaction of a flow of fluid from a microchannel with the cantilever beam. ...

In this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitted from the free end of the fiber cantilever and converges on the photosensitive surface of the ca...