one of the bio-sensing mechanisms is mechanical. rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. this study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on silicon wafer, with the ...

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...

One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...

   Micro-electroactive polymers have wide applications from industry to healthcare. Artificial muscles, microvalves, microswitches, haptic sensing, blood pressure and pulse monitoring are some potential applications for micro-electroactive polymers. The most advantage of micro-electroactive polymers as sensors and actuators is bio-compatibility and low power threshold for large deformations...

the static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. two engineering cases including cantilever and double cantilever micro-beam are considered. considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent euler-bernoulli beam model is used based on a modified couple stress theory, c...

nowadays, atomic force microscope is considered as a useful tool in the determination of intermolecular forces and surface topography with the resolution of nanometers. in this kind of microscope, micro cantilever is considered as the heart of the microscope and is used as a measuring tool.  this paper is aimed towards investigating the behavior of a piezoelectric micro cantilever with a triang...

Micro-cantilever arrays with different dimensions are fabricated by micromachining technique onto silicon <1 0 0> substrate. These sputtered Gold-Coated micro-cantilevers were later surface functionalized. Scanning Electron Microscopy, Atomic Force Microscopy and Optical SWLI using LASER probe are employed to characterize the morphology and image measurement of the micro-cantilever arrays, resp...

Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency s...

The static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. Two engineering cases including cantilever and double cantilever micro-beam are considered. Considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent Euler-Bernoulli beam model is used based on a modified couple stress theory, c...

The fabrication and characterization of SiGeC cantilever microcoolers are described. Silicon on insulator (SOI) was used as the substrate, and two layers of 3 μm p-SiGe0.07C0.0075 and 1.14 μm n-SiGe0.07C0.0075 lattice matched to silicon were grown using molecular beam epitaxy. The uni couple cooler was fabricated using conventional integrated circuit (IC) processing, and the cantilever structur...