A multi-state latching translation stage is demonstrated using microelectromechanical systems technology. The mechanism is fabricated in bonded silicon-on-insulator material with an 85 μm thick bonded layer, by single-layer patterning, deep reactive ion etching, undercutting and metallization. The table position can be continuously adjusted by electrothermal buckling mode actuators or latched i...

Two problems in the self-consistent, electrothermal co-simulation of nanoscale devices, are discussed. It is shown that the construction of dynamic compact thermal models for nanoscale devices, based on solution of the hyperbolic (wavelike) heat transport equation, can follow essentially the same approach as the authors’ analytical thermal impedance matrix method for the parabolic (diffusive) e...

The dielectrophoretic (DEP) separation of metallic and semiconducting single-walled carbon nanotubes (SWNTs) has been investigated. DEP separation experiments were performed by following the previous reports and the modification of Raman spectra was confirmed. We then theoretically investigated the impact of the flow field on the dielectrophoretic separation. The electrothermal flow was found t...

Electrothermal actuation provides the long displacement required by an increasing number of MEMS applications. However, its high power consumption is a limiting factor, especially for applications in which multiple actuators are required. An iris type variable optical attenuator (VOA), which was recently introduced by our group, is an example of such an application. In this paper we introduce a...

Thermal test structures and ring oscillators (ROs) are fabricated in 0.18-μm three-dimensional (3-D)–SOI technology. Measurements and electrothermal simulations show that thermal and parasitic effects due to 3-D packaging have a significant impact on circuit performance. A physical thermal model is parameterized to provide better prediction of circuit performance in 3-D technologies. Electrothe...

We show both gas pressure and species sensing capabilities based on the electrothermal effect of a multiwalled carbon nanotube (MWCNT). Upon exposure to gaseous environments, the resistance of a heated MWCNT is found to change following the conductive heat-transfer variances of gas molecules. To realize this mechanism, a suspended MWCNT is constructed by synthesis and assembly in localized chem...

An analysis of the physical processes occurring during emission sound waves by electrothermal sources (thermophones) showed that a thermophone is reversible system. This made it possible to determine conditions under which convertion an acoustic signal into alternating electric current can be carried out on active element and, hence, system will respond external field. Keywords: signal, element...

Article history: Received 29 June 2016 Accepted 8 July 2016 Available online 18 September 2016 SiC is a wide bandgap semiconductor with better electrothermal properties than silicon, including higher temperature of operation, higher breakdown voltage, lower losses and the ability to switch at higher frequencies. However, the power cycling performance of SiC devices in traditional silicon packag...

A technique is proposed to enhance microfluidic immuno-sensors, for example, immunoassays, in which a ligand immobilized on a microchannel wall specifically binds analyte flowing through the channel. These sensors can be limited in both response time and sensitivity by the diffusion of analyte to the sensing surface. In certain applications, the sensitivity and response of these heterogeneous i...