The soft X-ray reflectivity characterization of Mo/Si multilayer deposited by electron beam evaporation is discussed. The measurements are performed on Indus-1 synchrotron storage ring. The interdiffusion of two-layer materials in multilayer leads to the formation of interlayers. To understand the influence of interlayers and interfacial roughness on soft X-ray reflectivity profile, simulation ...

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1 For a tetrahedral of [SiO4], the asymmetrical vibrations of Si–O should always be IR active. Unfortunately, these modes were assumed to be IR inactive in Refs. [5,6]. 2 In Refs. [5,6], TO modes were calculated and compared with those obtained from IRAS using p-polarized and grazing incidence IR light [3– 6]. However, it is well-established that for dielectric thin films only the TO mode is ob...

We compare the reflectance and stability of multilayers comprising either Si/Mo, Si/Mo2C, Si/B4C, Si/C, or Si/SiC bilayers, designed for use as extreme-ultraviolet (EUV) reflective coatings. The films were deposited by using magnetron sputtering and characterized by both x-ray and EUV reflectometry. We find that the new Si/SiC multilayer offers the greatest spectral selectivity at the longer wa...

Refractory-metal-based alloys are a potential replacement of current nickel-based superalloys due to their excellent mechanical strength at extremely high temperatures. However, severe oxidation in high-temperature working environment limits application. To address this challenge, two-step coating process (including Mo precoat and Si-B pack cementation) was applied an innovative refractory mult...