This study presents an electrically actuated tilting micro platform based on liquid dielectrophoresis with three axes movement using droplets situated 120° apart from each other. The interdigitated electrodes produce a non-uniform electric field that generates body force. dielectrophoretic mechanism is responsive within at least 30 ms, and it eliminates the solid-solid contact. enabled angular ...

We present a fully monolithically integrated long vertical cavity surface emitting laser using an InGaAs/GaAs/AlGaAs gain medium directly bonded to a glass substrate with a concave micromirror. The lasing wavelength is 980nm with a threshold of 20mA for a 52microm mesa, differential quantum efficiency of 58%, and maximum output power of 39mW.

We have previously described the development of a μSL system using a Digital Micromirror Device (DMD) for dynamic pattern generation and an ultraviolet (UV) lamp filtered at 365 nm for crosslinking the photoreactive polymer solution. The μSL system was designed with x-y resolution of ~2 μm and a vertical (z) resolution of ~1 μm (with practical limitations on vertical resolution of ~30 μm result...

The Digital Micromirror Device (DMD) has made great strides in both performance and reliability. Each device consists of more than 500,000 individually addressable micromirrors. Digital Light Processing technology, based on the DMD, has been used in such diverse products as projection displays with film-like projected images and photographic-quality printers. Reliability testing of the DMD has ...

This paper describes an endoscopic-inspired imaging system employing a micro-electromechanical system (MEMS) micromirror scanner to achieve beam scanning for optical coherence tomography (OCT) imaging. Miniaturization of a scanning mirror using MEMS technology can allow a fully functional imaging probe to be contained in a package sufficiently small for utilization in a working channel of a sta...

We demonstrate a means of creating a digital image by using a two axis tilt micromirror to scan a scene. For each different orientation we extract a single grayscale value from the mirror and combine them to form a single composite image. This allows one to choose the distribution of the samples, and so in principle a variable resolution image could be created. We demonstrate this ability to co...