Micro-electromechanical system (MEMS) devices are small compared to normal mechanical devices, but they are still large compared to the wavelength of visible light. Thus, simple low-cost optical measurement techniques can be adapted for precise characterization of the motions of these small objects. The results of such measurements are important for veriication of simulations, especially for de...

In this paper, we present an approach to design MOEMS based on Reconfigurable Free Space Micro-Optical Benches (RFS-MOB). The proposed concept enables to design modular and reconfigurable MOEMS by using a generic structure of silicon holders and non defined position in the substrate. Various micro-optical elements, e.g. microlenses or micromirrors, can be integrated within holders. Their assemb...

This paper deals with the design, fabrication and characterization of a tool changer for micromanipulation cells. This tool changer is part of a manipulation cell including a three linear axes robot and a piezoelectric microgripper. All these parts are designed to perform micromanipulation tasks in confined spaces such as a microfactory or in the chamber of a scanning electron microscope (SEM)....

Microelectromechanical systems (MEMS) offer numerous applications thanks to their miniaturization, low power consumption and tight integration with control and sense electronics. They are used in automotive, biomedical, aerospace and communication technologies to achieve different functions in sensing, actuating and controlling. However, these microsystems are subject to degradations and failur...

In this paper, a modular microactuator based on shape memory alloy (SMA) actuation to drive the joints of a microgripper is described. Its design is a combination of two SMA actuators installed on the links of a special mechanism : one of them drives the rotation of the joint and the other one produces the necessary force to manipulate objects. An accurate model of the thermo-mechanical behavio...

With direct laser writing micro structures can be manufactured by solidifying a photo resist when the beam triggers photochemical reaction in focal voxel. We have used to fabricate thermally actuated microgripper, which move its two cantilever like arms grip micro-objects. One consists thereby of strips with different coefficients thermal expansion such that both cantilevers bends towards each ...

A small-scale flexure-based gripper was designed for manipulation tasks requiring precision position and force control. The gripper is actuated by a piezoelectric ceramic stack actuator and utilizes strain gages to measure both the gripping force and displacement. The position and force bandwidths were designed for ten Hertz and one hundred Hertz, respectively, in order to afford human-based te...