Nanoelectromechanical (NEM) switches are similar to conventional semiconductor switches in that they can be used as relays, transistors, logic devices and sensors. However, the operating principles of NEM switches and semiconductor switches are fundamentally different. These differences give NEM switches an advantage over semiconductor switches in some applications--for example, NEM switches pe...

Instead of using conventional flat and rectangular chip technology, our idea is to make semiconductor devices and sensors on 1mm-diameter spherical silicon (Ball) substrates. This paper describes five key enabling process technologies to realize Ball devices such as 3-axis accelerometer.

This paper presents a comprehensive review of diamond electronics from the RF perspective. Our aim was to find and present the potential, limitations and current status of diamond semiconductor devices as well as to investigate its suitability for RF device applications. While doing this, we briefly analysed the physics and chemistry of CVD diamond process for a better understanding of the reas...

Almost ever since the advent of the microelectronics adventure, silicon-based MOSFET (metal–oxide–semiconductor fieldeffect transistor) technology has been largely dominant. However, for a few years now this technology has exhibited some fundamental limitations in tackling the increasingly challenging issues of miniaturization and improvements in processing speed and power consumption. Hence, n...

VOLUME 14, NUMBER 2, 2003 LINCOLN LABORATORY JOURNAL 221 O  ,   of patterning, has enabled semiconductor devices to progressively shrink since the inception of integrated circuits more than three decades ago. Throughout the 1980s and 1990s, the trend of miniaturization continued unabated and even accelerated. Current semiconductor devices are being mass produced wi...

The market for power semiconductor modules is spreading not only to general-purpose inverters, servo motor drives, NC machine tools and elevators but also to new applications through the realization of electric vehicles and renewable energy systems. Fuji Electric has developed various power modules in response to market needs, and as the market expands in the future, the required performance fo...

A programmable simulation environment for semiconductor technology analysis is presented. The SIESTA project sets out to combine the advantages of a comfortable, intuitive visual user interface with the flexibility and versatility of a high-level programming language. It is designed to provide a set of framework services to ensure a straight-forward definition of complex technology analysis tas...

Electronic devices and their highly integrated components formed from semiconductor crystals contain complex three-dimensional (3D) arrangements of elements and wiring. Photonic crystals, being analogous to semiconductor crystals, are expected to require a 3D structure to form successful optoelectronic devices. Here, we report a novel fabrication technology for a semiconductor 3D photonic cryst...

In recent years, semiconductor photocatalytic process has shown a great potential as a lowcost, environmental friendly and sustainable treatment technology to align with the“zero” waste scheme in the water/wastewater industry. The ability of this advanced oxidation technology has been widely demonstrated to remove persistent organic compounds and microorganisms in water. This paper presents the...