We present a MEMS microphone that converts the mechanical motion of a diaphragm, generated by acoustic waves, to an electrical output voltage by capacitive fingers. The sensitivity of a microphone is one of the most important properties of its design. The sensitivity is proportional to the applied bias voltage. However, it is limited by the pull-in voltage, which causes the parallel plates to c...

This study is devoted to providing predictions of the pull-in parameters (pull-in voltage and pull-in displacement) of electro-statically actuated micro-beams based on a continuous model using Genetic Algorithm (GA) technique. A phenomenon in which the actuated electrode comes in direct contact with the fixed electrode due to the electrostatic force is called pull-in instability. Accurate deter...

Electrostatic actuators are used as voltage-controlled oscillators or resonators in high frequency applications. The change in deflection of a cantilever beam due to an applied voltage leads to change in capacitance between the plates of the beam. However, the range of operation of these devices is limited due to the nonlinear nature of the applied electrostatic forces as the cantilever beam mo...

In this paper, a nonlinear theory applicable to the design of nanotube based devices is presented. The role of finite kinematics for a doubly clamped nanotube device is investigated. In particular, we analyze the continuous deformation and instability (pull in) of a clamped-clamped nanotube suspended over an electrode from which a potential differential is imposed. The transformation of an appl...

In this paper, static and dynamic behavior of a varactor of a micro-phase shifter under DC, step DC and AC voltages and effects of the residual stress on the phase diagram have been studied. By presenting a mathematical modeling, Galerkin-based step by step linearization method (SSLM) and Galerkin-based reduced order model have been used to solve the governing static and dynamic equations, resp...

In this paper static and dynamic responses of a fixed-fixed microbeam to electrostatic force and mechanical shock for different cases have been studied. The governing equations whose solution holds the answer to all our questions about the mechanical behavior is the nonlinear elasto-electrostatic equations. Due to the nonlinearity and complexity of the derived equations analytical solution are ...

Using differential quadrature method (DQM), this study investigated pull-in instability of beam-type nano-switches under the effects of small-scale and intermolecular forces including the van der Waals (vdW) and the Casimir forces. In these nano-switches, electrostatic forces served as the driving force, and von-Karman type nonlinear strain was used to examine nonlinear geometric effects. To de...

A general theoretical model using the coupling effect between the torsion and bending is presented in this paper, which characterizes the static properties of the electrostatic torsional micromirror, especially its pull-in effect. A set of normalized equations governing the static actuation properties of the torsional micromirror based on the parallel plate capacitor model is derived to demonst...

In this paper, a model for MEMS capacitive microphone is presented for integrated circuits.  The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no...