The main limitation of high-temperature piezoresistive pressure sensors is the variation of output voltage with operating temperature, which seriously reduces their measurement accuracy. This paper presents a passive resistor temperature compensation technique whose parameters are calculated using differential equations. Unlike traditional experiential arithmetic, the differential equations are...

Here, we provide a method and apparatus for real-time compensation of the thermal effect of single free-standing piezoresistive microcantilever-based biosensors. The sensor chip contained an on-chip fixed piezoresistor that served as a temperature sensor, and a multilayer microcantilever with an embedded piezoresistor served as a biomolecular sensor. This method employed the calibrated relation...

We have developed a new label-free detection method where specific biomolecules adsorb to the walls of a suspended microchannel resonator, or simply flow through and thereby lower its resonant frequency. The oscillation of the microchannel is measured optically by reflecting a laser beam off the channel surface and detecting its position with a photo-sensitive detector. While the optical readou...

A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two deg...

The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...

Study of sensitivity and noise in the piezoelectric self-sensing and self-actuating cantilever with an integrated Wheatstone bridge circuit Rev. Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators Rev. Quasistatic displacement self-sensing method for cantilevered piezoelectric actuators Rev. The lateral resolution of many electrical scanning p...

In order to meet the requirement of high sensitivity and signal-to-noise ratios (SNR), this study develops and optimizes a piezoresistive pressure sensor by using double silicon nanowire (SiNW) as the piezoresistive sensing element. First of all, ANSYS finite element method and voltage noise models are adopted to optimize the sensor size and the sensor output (such as sensitivity, voltage noise...

The interest in patterning surfaces with microand nanometer resolutions has been growing fast in recentyears, illustrating the tremendous potential of patterning techniques for both fundamental investigationsand technological applications in photonics, molecular electronics, and biosensors. Among the variouspatterning methods, liquid dispensing techniques relying on the use of m...

We propose the nano-scale displacement sensor with high resolution for weak-force systems could be realized based on vertical stacked two-dimensional (2D) atomic corrugated layer materials bound through Van der Waals (VdW) interaction. Using first-principles calculations, we found the electronic structure of bi-layer blue phosphorus (BLBP) varies appreciably to both the lateral and vertical int...

MEMS technology has revoluntionized microfabrication, and the sensors and actuators industries. What is the state of the art of MEMS applications that use ceramic materials? what are major trends of development for the MEMS field in the future? this talk will present a broad and timely overview for conference attendees that address these twoquestions. The integrated circuit (IC) technology is t...