The purpose of this paper is to apply MEMS techniques to manufacture a gas flow sensor that consists with an airflow rate and airflow direction sensing units for detection of airflow states. This study uses a silicon wafer as a substrate which is deposited silicon nitride layers. To form the airflow rate sensing unit, a micro heater and a sensing resistor are manufactured over a membrane that r...

Micro-cantilever sensors are widely used to detect biomolecules, chemical gases, and ionic species. However, the theoretical descriptions and predictive modeling of these devices are not well developed, and lag behind advances in fabrication and applications. In this paper, we present a novel multiscale simulation framework for nanomechanical sensors. This framework, combining density functiona...

In this paper, we have addressed the Design and simulation results of an electrostatically controlled micro mirror using COMSOL multiphysics Software. The structural mechanical properties of the actuation mechanism of a square shape micro-mirror with the lift-off of the structure used four springs simulating a prestressed cantilever beam. There are few base materials were introduced like Alumin...

Over the last few years the demand for miniature objects and devices has continuously increased. So the need for MEMS (Micro Electro Mechanical Systems) and MOEMS (Micro Opto Electro Mechanical Systems) in various fields has become more and more important. New micromanipulation technologies must be developed that take into account the specificities of MEMS and MOEMS. For performing manipulation...

We report the development of scanning thermoreflectance thermometry and its application for steady and dynamic temperature measurement of a heated microcantilever. The local thermoreflectance signal of the heated microcantilever was calibrated to temperature while the cantilever was under steady and periodic heating operation. The temperature resolution of our approach is 0.6 K, and the spatial...

Sidewall roughness measurement is becoming increasingly important in the micro-electromechanical systems and nanoelectronics devices. Atomic force microscopy (AFM) is an emerging technique for sidewall scanning and roughness measurement due to its high resolution, three-dimensional imaging capability and high accuracy. We report an AFM sidewall imaging method with a quartz tuning fork (QTF) for...

Adhesive cells including fibroblasts produce contractile forces to the underlying substrate for their locomotion. Such forces are not only high enough to deform compliant membranes such as silicone but also bend rigid micro-cantilevers. The cell-induced bending of silicon micro-cantilevers was determined using laser deflection during trypsin treatment. The observed cantilever relaxation corresp...

Methods to calculate fluid density and viscosity using a micro-cantilever and based on the resonance principle were put forward. Their measuring mechanisms were analyzed and the theoretical equations to calculate the density and viscosity were deduced. The fluid-solid coupling simulations were completed for the micro-cantilevers with different shapes. The sensing chips with micro-cantilevers we...

A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS) cantilever for a chemical sensitive mass based sensor has been carried out to enhance sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing the stress concentration region (SCR). Three types of SCR geometry designs were first analysed using Intellisuite software to study the effect of str...