A novel technique to measure in situ, simultaneously, temperature and thin film thickness during semiconductor processing is described in this paper. The measurement technique is based on the principle propagating in a silicon wafer is a function of both the that the velocity of an ultrasonic Lamb wave wafer temperature and the thin film coating on the wafer surface. We are able to btain the pr...

To overcome the limitations/disadvantages of many known liquid film thickness sensing devices (viz. conductivity probes, reflectance based fiber-optics probes, capacitance probes, etc.), a new liquid film thickness sensor that utilizes fluorescence phenomena and fiber-optic technology has been developed and reported here. Measurements from this sensor are expected to facilitate better understan...

Many studies have already considered starved lubrication. However, there have been no reports on the oil film thicknesses under steady starved EHL (elastohydrodynamic lubrication), where the ultra-low volume of oil supplied per unit time is uniform. The present study examined the relationship between the supplied oil flow rate and oil film thickness under steady starved lubrication. A ball-on-d...

The measurement of the thickness of an oil film in a lubricated component is essential information for performance monitoring and control. In this work a new method for oil film thickness measurement, based on the reflection of ultrasound, is evaluated for use in fluid film journal bearing applications. An ultrasonic wave will be partially reflected when it strikes a thin layer between two soli...

A new experimental method was applied in in situ corrosion monitoring of mild steel Q235 under alternate wet-dry conditions. The thickness of the electrolyte film during the wet cycle was monitored by a high-precision balance with a sensibility of 0.1 mg. At the same time, an electrochemical impedance technique was employed to study the effect of film thickness on corrosion rates. Experimental ...

Surface wear of metal-on-metal (MoM) hip joints is an ongoing problem that can result in the formation of nano-wear particles and premature failure of the prosthesis. Wear is essentially controlled by the properties of the synovial lubricating film and the nature of the articulating surface. The interfacial film thickness formed within the loaded contact zone during the gait cycle is the most i...

The work is focused on thin film technologies especially on sputtering of dielectric thin film layers. The set of thin film capacitors was created on silica glass substrate. Aluminum electrodes of separated capacitors are deposited by method of vacuum evaporation. The AlN dielectric layer was prepared by reactive high frequency sputtering from aluminum target in nitrogen atmosphere. Dielectric ...

Several models have been developed to extract the intrinsic elastic modulus of thin films from the composite film/substrate modulus value obtained from indentation tests on coated systems. Either analytical, semi-analytical or empirical, they generally propose an expression of the composite modulus as a function of the film and substrate elastic moduli and of the film thickness. When the substr...

In the present paper, we propose a method to fabricate a ‘‘micro-collimator’’ with a thickness of 15mm. A commercially available PADC film with a thickness of 100mm was first chemically etched with NaOH/ethanol solution to obtain a thin PADC film. This thin PADC film was then irradiated by 5MeV a particles through a ‘‘macro-collimator’’ with a thickness of 5mm and a hole diameter of 1mm. This P...