The pull-in voltage of a single-side anchored freestanding beam, under lateral deflection, has been investigated for application as a dc voltage reference. Two sets of electrodes, alongside the tip, are used for parallel-plate type of electrostatic actuation of the 200 m long beam in the plane of the wafer. Another set of buried electrodes is aligned with the plate electrode at the free-standin...

An electrostatic torsion micromirror is designed using the optimized spring-shaped torsion beams and U-shaped groove supporters. The main advantages of this design will be a reduction in the pull-in voltage for low-voltage applications and the function as a switch of the instability mode by adjusting the effective bending stiffness of the torsion beam. In this design, a theoretical model is dev...

We study the influence of von Karman nonlinearity, van der Waals force, and a athermal stresses on pull-in instability and small vibrations of electrostatically actuated mi-croplates. We use the Galerkin method to develop a tractable reduced-order model for elec-trostatically actuated clamped rectangular microplates in the presence of van der Waals forcesand thermal stresses. More specifically,...

Low-noise lTL-compatible off-chip driver (OCD) circuits are very important, especially for low-power electronics, but scaled-down CMOS technology requires a lower operating voltage of 3.3 V, while most applications require 5 V. The dual power-supply requirement makes the design of OCD challenging, first because pull-up devices, especially p-MOS devices, must be able to handle an off-chip voltag...

Gyroscopes are used as rotation rate sensors. Conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. Micro-gyroscopes have solved these problems due to their small size. The beam micro-gyroscope is one of the popular types of inertial sensors. Their small dimensions and low energy consumption are key reasons for their popul...

Abstract In this paper we present design and analysis of RF MEMS switches with crab-leg connection beam structures. The mechanical characteristics of switch including pull down voltage, hysteresis analysis and capacitance between beam and center conductor are studied. RF characterization of the switch including insertion loss, return loss and isolation are also investigated. Measurement results...

In this paper, analytical closed-form expressions to accurately estimate the pull-in characteristics of an electrostatically-actuated doubly-clamped nanobeam are derived and examined. In this regard, a coupled electro-mechanical problem for the nano-actuator is first presented assuming a single mode approximation while taking into account all the possible structural, electrical and nanoscale ef...

This paper presents the comparison of Push-Pull Inverter and Z-Source Inverter based Static Compensators (STATCOM).The closed loop system with STATCOM is modeled and simulated using the blocks of MATLAB/SIMULINK.Voltage sag mitigation using Push-Pull Inverter and ZSource Inverter are presented. The present work proposes Z-Source Inverter and Push-Pull Inverter based STATCOM for the control of r...