Piezoelectric actuators (PEAs) have been widely used in micro- and nanopositioning applications due to their fine resolution, rapid responses, and large actuating forces. However, a major deficiency of PEAs is that their accuracy is seriously limited by hysteresis. This paper presents adaptive model predictive control technique for reducing hysteresis in PEAs based on autoregressive exogenous m...

Nanopositioning and nanomeasuring machines are 3D coordinate measuring systems with nanometer precision at measurement volumes in the cubic centimeter range. The base is formed by an interferometer system a common mirror corner. orthogonality deviations of corner require transformation axes. uncertainty must be taken into account overall budget. Starting from complete model, result model simpli...

The positioning performance of piezo-based nanopositioning systems is limited by dynamic and hysteresis effects in the piezoactuator. Herein, a high-performance, dual-stage repetitive controller (dual-RC) with a feedforward hysteresis compensator is proposed for tracking periodic trajectories, such as the scanning-type motion, in nanopositioning systems. Firstly, a discrete-time dual-RC is crea...

Piezoelectric tube scanners with quartered external electrodes are the most widely used nanopositioning technology in modern scanning probe microscopes. There has been increasing interest in utilizing feedback control techniques to improve bandwidth and accuracy of these nanopositioners. The use of feedback requires a sensor to be incorporated into the nanopositioning device. Noncontact displac...

High bandwidth, high resolution positioning is a significant enabling tool for nanotechnology. Unfortunately, in a typical nanopositioner operating in closed loop, higher bandwidth results in increased sensitivity to measurement noise and hence reduced resolution. In this article we present a technique that allows high-precision tracking of repetitive, jitter-free reference signals without bein...

The article describes a new technique for measuring the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment such as laser interferometers. The resolution of ...

Smart actuators are the key components in a variety of nanopositioning applications, such as scanning probe microscopes and atomic force microscopes. Piezoelectric actuators are the most common actuators among a variety of smart actuators due to their high resolution, low power consumption and wide operating frequency but they suffer hysteresis which affects linearity. In this paper, an innovat...