in previous researches, mechanical behavior of a microgripper with homogenous and the same material has been studied. in this paper considering the desired characteristics of fgms, as a good thermal and wear resistance, the mechanical behavior of fgm microgripper under dc voltage and temperature variations is investigated. it is assumed that the two microbeams of the fgm microgripper are mounte...

In this work we report on microactuators and microgrippers fabricated from SOI (Silicon On Insulator) wafers by a surface and bulk micromachining fabrication technology. The main advantages of this technology are: a) large thickness of the devices (10 μm up to 40 μm) resulting in devices which are stable against disturbing forces perpendicular (z-direction) to the ground plate. b) the small num...

A flip-chip, batch transfer process for LIthographie, Galvanoformung and Abformung (LIGA) microstructures has been demonstrated by selective electroplating and bonding. Single layer LIGA microstructures with thickness of 200 m are fabricated on a dummy substrate first. They are then batch transferred to an IC substrate by means of bonding via electroplating. After the selective bonding process,...

This paper deals with the design, fabrication and experimental validation of several modules of a micro-assembly system. On one hand, a microgripper is integrated in a four degrees of freedom system. On the other hand, a tool changer is designed. It enables to exchange automatically the tip part of the microgripper and then dedicated tools can be used to achieve specific tasks. The principle of...

A system using microgripper for gluing and adhesive bonding in automatic microassembly was designed, implemented, and tested. The development of system is guided by axiomatic design principle. With a compliant PU microgripper, regional-edge-statistics (RES) algorithm, and PD controller, a visual-servoing system was implemented for gripping micro object, gluing adhesive, and operating adhesive b...

Abstract. MEMS-Technology based microgrippers have been recently used in different fields of applications. These microsystems can be actuated by means electrostatic actuators, such as linear or rotary comb drives, but the robustness and feasibility components static well dynamic conditions still raises some concerns. In order to contribute fill this gap, properties a MEMS-Techology Based silico...