Composite materials consisting of polymers and nanoparticles can provide additional functionality to existing formulations. Diamondoids, single-wall carbon nanotubes (SWNT), and gold nanospheres were physically incorporated into the negative photoresist SU-8 to investigate their effects on residual stresses and introduce piezoresistivity. The mixtures were spin cast onto silicon or aluminumcoat...

In 1997, the first paper using SU-8 as a material for microfabrication was published [1], demonstrating the interest of this negative photoresist for the near-UV structuration of thick layers and the manufacturing of high aspect-ratio components. SU-8 quickly became a cheap alternative to X-ray LIGA, at least for applications that did not require the extreme aspect ratios and precision that can...

SU-8 epoxy-based negative photoresist has been extensively employed as a structural material for fabrication of numerous biological microelectro-mechanical systems (Bio-MEMS) or lab-on-a-chip (LOC) devices. However, SU-8 has a high autofluorescence level that limits sensitivity of microdevices that use fluorescence as the predominant detection workhorse. Here, we show that deposition of a thin ...

Microfabrication advances have resulted in small, cheap, and precise devices for biological microelectromechanical systems (bioMEMS). SU-8/SU-8 2000 is an attractive material for these applications because of its high-aspect ratio fabrication capability, dielectric properties, and thermochemical stability. Despite these advantages, the potential toxicity of SU-8 2000 may limit its use in cell-b...

Haraz-Ghareh Su is one of the seven sub-basins of the Caspian basin, located on the southern shores of the Caspian Sea, and as such, is in danger of water crisis due to absence of proper systematic policy and strategy. In this study, the pressure factors on the Haraz-Ghareh Su water resources were identified using DPSIR model. Then, the pressure parameters on the freshwater resources in the Cas...

Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young's modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 can...

We present a SU-8 based polymerase chain reaction (PCR) chip with integrated platinum thin film heaters and temperature sensor. The device is fabricated in SU-8 on a glass substrate. The use of SU-8 provides a simple microfabrication process for the PCR chamber, controllable surface properties and can allow on chip integration to other SU-8 based functional elements. Finite element modeling (FE...

The use of SU-8 photoresist as a structuring material for portable capillary-flow cytometry devices has been restricted by the nearhydrophobic nature of the SU-8 surface. In this work, we evaluate the use of chemical and plasma treatments to render the SU-8 surface hydrophilic and characterise the resulting surface utilising a combination of techniques including contact angle goniometry, atomic...