Microcantilever platforms with integrated piezoresistors have found versatile applications in the field of clinical analysis and diagnostics. Even though treatise encompasses numerous design details of the cantilever based biochemical sensors, a majority of them focus on the generic slender rectangular cantilever platform mainly due to its evolution from the atomic force microscope (AFM). The r...

CTS began manufacturing pointing devices in 1994 for use as cursor controls, mounted in the keyboards of notebook computers. While completed keyboards were robust against ESD, many precautions were required during manufacture and assembly to protect against the effects of ESD. While these ESD “protective” controls were effective in controlling ESD, they did not eliminate the ESD susceptibility ...

Microfabricated transducers have enabled new approaches for detection of biomolecules and cells. Integration of electronics with these tools simplify systems and provide platforms for robust use outside of the laboratory setting. Suspended microchannel resonators (SMRs) are sensitive microfluidic platforms used to precisely measure the buoyant mass of single cells and monolayers of protein in f...

This study develops a MEMS-based low-cost sensing platform for sensing gas flow rate and flow direction comprising four silicon nitride cantilever beams arranged in a cross-form configuration, a circular hot-wire flow meter suspended on a silicon nitride membrane, and an integrated resistive temperature detector (RTD). In the proposed device, the flow rate is inversely derived from the change i...

The demand for flexible and wearable sensors is increasing day by due to varied applications in the biomedical field. Especially highly sensitive are required detection of low signal from body. It important develop a pressure sensor that can convert maximum input into electrical output. In this paper, design performance graphene piezoresistive have been investigated zig–zag piezoresistors on sq...

This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge was constructed through easy wiring allowed by the three metal layers in the 0.5 μm CMOS technology...

The theoretical model and experimental characteristics of ultra-high sensitivity MEMS pressure sensor chip for 1 kPa utilizing a novel electrical circuit are presented. uses piezosensitive differential amplifier with negative feedback loop (PDA-NFL) based on two bipolar-junction transistors (BJT). BJT has vertical structure n-p-n type (V-NPN) formed non-deformable area. contains eight piezoresi...