This paper reports a novel large vertical displacement (LVD) microactuator that can generate large piston motion and bi-directional scanning at low driving voltage. A LVD micromirror device has been fabricated by using a unique deep reactive ion etch (DRIE) post-CMOS micromachining process that simultaneously provides thin-film and single-crystal silicon microstructures. The bimorph actuation s...

Fabrication of hydrogel microstructures has attracted considerable attention. A large number of applications, such as fabricating tissue engineering scaffolds, delivering drugs to diseased tissue, and constructing extracellular matrix for studying cell behaviors, have been introduced. In this article, an ultraviolet (UV)-curing method based on a digital micromirror device (DMD) for fabricating ...

Active control of the spectral and temporal output characteristics of solid-state lasers through use of MEMS scanning micromirrors is presented. A side-pumped Nd:YAG laser with two intracavity scanning micromirrors, enabling Qswitching operation with controllable pulse duration and pulse-on-demand capabilities, is investigated. Changing the actuation signal of one micromirror allows a variation...

Magnetically-actuated Micromirrors as Micro-electromechanical devices have exhibited their superiority over other magnetic sensing techniques in terms of high sensitivity and high spatial resolution, which is favoured not only by quantitative measurement but also imaging of magnetic field distribution. In our research into magnetic field sensing and imaging, a 2D magnetic field sensing system w...

This work presents the micro-machined 2-D switch array for use on free-space optical interconnect platform integrated with a digital 1×8 de-multiplexer control circuit together. Moreover, this device employs electrostatic actuation for light beam directions control. The CMOS-MEMS array-based optical platform contains 10×10 circular micromirrors switching spots, the diameter of each mirror is ab...

Input saturation is a widespread phenomenon in the field of instrumentation, and is harmful to performance and robustness. In this paper, a control design framework based on composite nonlinear feedback (CNF) and integral sliding mode (ISM) technique is proposed for a MEMS micromirror to improve its performance under input saturation. To make the framework more effective, some essential improve...

This paper describes the design and analysis of a particular micro-electromechanical-system (MEMS) micromirror device that can be used for an optical switching application. Analytical expressions for electrostatic torque and restoring torque of serpentine springs are derived. The performance of the proposed structure is compared with the existing structures having straight torsional beams. The ...

We have developed a novel wafer-scale single-crystalline silicon micromirror bonding process to fabricate optically flat micromirrors on polysilicon surface-micromachined 2D scanners. The electrostatically actuated 2D scanner has a mirror area of 450 jtm x 450 tm and an optical scan angle of Compared to micromirrors made with a standard polysilicon surface-micromachining process, the radius of ...

The purpose of this paper is to present a direct digital manufacturing (DDM) process that is an order of magnitude faster than other DDM processes currently available. The developed process is based on a mask-image-projection-based Stereolithography process (MIP-SL), during which a Digital Micromirror Device (DMD) controlled projection light cures and cross-links liquid photopolymer resin. In o...