نتایج جستجو برای: metallorganic chemical vapor deposition

تعداد نتایج: 477209  

Journal: :journal of physical & theoretical chemistry 2009
f. bisepar z. haghparast s. a. khorrami s. moradi r. cheraghali

using c2h2, 112 and as gases at 550'c, carbon nanotubes were fabricated on the surfaces of twosubstrates coated by nano thin layers of metal catalysts by dc magnetron sputtering. aystamless steel andfe/cteal, by thermal chemical vapor deposition (tcvd) the surface properties of the substrates wereparticularly investigated, and the effect of treatment of the substrates on the cnt's growth is cri...

Journal: :journal of nanostructures 0
ashish karn st. anthony falls laboratory, university of minnesota twin cities, minneapolis, mn, usa nitesh kumar yale university, whitney avenue, new haven, ct, usa sivanandam aravindan indian institute of technology delhi, hauz khas, new delhi, india

the current study reports some interesting growth of novel in2o3 nanostructures using ambient-controlled chemical vapor deposition technique in the presence of a strongly reducing hydrazine ambient. the experiments are systematically carried out by keeping either of the carrier gas flow rate or the source temperature constant, and varying the other. for each of the depositions, the growth is st...

2015
K. H. A. Bogart N. F. Dalleska G. R. Bogart Ellen R. Fisher

Articles you may be interested in Investigation of SiO2 plasma enhanced chemical vapor deposition through tetraethoxysilane using attenuated total reflection Fourier transform infrared spectroscopy Monte Carlo simulation of surface kinetics during plasma enhanced chemical vapor deposition of SiO2 using oxygen/tetraethoxysilane chemistry Determination of the mechanical stress in plasma enhanced ...

2016
Subrina Rafique Lu Han Marko J. Tadjer Jaime A. Freitas Nadeemullah A. Mahadik Hongping Zhao Jaime A. Freitas

Journal: :Microelectronics Reliability 2005
E. Sleeckx Marc Schaekers X. Shi E. Kunnen B. Degroote M. Jurczak M. de Potter de ten Broeck E. Augendre

This paper gives some insights in the applications where PECVD nitrides can be introduced to replace the LPCVD layers and how the process parameters need to be varied to obtain the desired properties. Film properties like stress, hydrogen content, wet etch rate and deposition rate are reported. The nitrides are optimized for specific applications and examples on the influence of nitride propert...

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