Norman A. Fleck W. I. Milne University of Cambridge Department of Engineering Cambridge, CB2 1PZ United Kingdom Abstract. The in-plane motion of microelectrothermal actuator (‘‘heatuator’’) has been analyzed for Si-based and metallic devices. It was found that the lateral deflection of a heatuator made of a Ni metal is about ;60% larger than that of a Si-based actuator under the same power cons...

Abstract This paper presents a dynamical model for the dynamics of bimetallic strip in industrial circuit breakers. The acts as thermo-mechanical actuator that opens breaker case overloads. overall can be decomposed two submodels: an electrothermal and one. first submodel is derived gray-box, while second one black-box. Given estimated model, final aim to determine appropriate calibration actio...

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded he...

Optical devices are frequently being used in medical applications to image lesions and malignancies, assist with surgical procedures. The advances micro-electro-mechanical systems (MEMSs) optics led the fabrication of flexible endoscopes as small a few millimeters diameter. design sub-millimeter sized optical fiber scanner is presented this paper. proposed consisted vibrating that carried laser...

We have developed an analytical model that describes the steady-state thermal behavior of a 1-D electrothermal bimorph MEMS micromirror. The steady-state 1-D heat transport equation is used to solve for the temperature distribution of the device upon actuation. Three models are developed using different thermal conditions on the device. The models consider heat dissipation from conduction and c...

In this paper, an electrothermal shape memory alloy helical spring actuator constructed from with copper-cored enameled wire is presented and fabricated. Based on the shear constitutive model of a alloy, Thermo equilibrium equation geometrical establish thermomechanical theoretical alloys under different scenarios. The behaviors were verified by numerical simulation experimental tests, properti...