The electromechanical properties of arrays of vertically aligned multiwalled carbon nanotubes were studied in a parallel plate capacitor geometry. The electrostatic actuation was visualized using both optical microscopy and scanning electron microscopy, and highly reproducible behaviour was achieved for actuation voltages below the pull-in voltage. The walls of vertically aligned carbon nanotub...

 Using the SEM analysis technique, we present the first direct evidences of the non-uniform distribution of charges trapped in the dielectric layer during the actuation of electrostatic MEM devices. We highlight the importance of the contact quality to control the charge injection in the dielectric. We further incorporate the non-uniform charge distribution in a 2D model of the actuation of de...

The paper deals with the mechanical behavior of a micro-beam bonded with two piezoelectric layers. The micro-beam is suspended over a fixed substrate and undergoes the both piezoelectric and electrostatic actuation. The piezoelectric layers are poled through the thickness and equipped with surface electrodes. The equation governing the micro-beam deflection under electrostatic pressure is deriv...

Cavity optomechanical systems offer one of the most sensitive methods for detecting mechanical motion using shifts in the optical resonance frequency of the optomechanical resonator. Presently, these systems are used for measuring mechanical thermal noise displacement or mechanical motion actuated by optical forces. Electrostatic capacitive actuation and detection have been shown previously for...

With their unparalleled mass sensitivity, enabling single-molecule spectrometry, nanomechanical resonators have the potential to considerably improve existing sensor technology. Vertical pillar are a promising alternative lateral resonator designs. However, one major obstacle still stands in way of practical use: The efficient transduction (actuation & detection) vibrational motion such...

A microactuating structure with vertical polyimide hinges has been designed, fabricated and tested. Unlike traditional microactuators, which are located on the substrate surface, this new actuation mechanism is capable of producing linear motion at a point far from the substrate. This advantage can make it possible to drive other out-of-plane folded structures for on-wafer or out-of-wafer appli...