نتایج جستجو برای: pulsed pecvd
تعداد نتایج: 36207 فیلتر نتایج به سال:
A ubiquitous goal in plasma-enhanced chemical vapour deposition (PECVD) is to describe the correlation between film properties and categorical and quantitative input variables. The correlations within the high-dimensional parameter space are described using a multivariate model. Bayesian group analysis is employed to assess the grouping structures of the set of data vectors. This allows to iden...
Diamond-like carbon (DLC), a thin amorphous carbon film, has many uses in tribological systems. Exploiting alternative substrates and interlayers can enable control of the hardness and modulus of the multi-layer system and improve wear or friction properties. We utilise XPS and AFM to examine DLC concurrently coated on an epoxy interlayer and a steel substrate by plasma enhanced chemical vapour...
We observed current density (J) dependent degradation in field emission current from multiwalled carbon nanotubes (MWCNTs). These degradations are recoverable and can be explained by emission current-induced dislocations along the MWCNTs. MWCNTs grown by thermal chemical vapour deposition (CVD) can emit stable current continuously for at least 1200 min with upper current density limits of appro...
OBJECTIVE To evaluate plasma-enhanced, chemically vapor deposited (PECVD) amorphous silicon carbide (α-SiC:H) as a protective coating for retinal prostheses and other implantable devices, and to study their failure mechanisms in vivo. APPROACH Retinal prostheses were implanted in rats sub-retinally for up to 1 year. Degradation of implants was characterized by optical and scanning electron mi...
Silicon oxynitride (SiON) is a highly attractive material for integrated optics, due to its excellent properties such as high transparency, adjustable refractive index and good stability. In general, the growth of SiON layers by plasma enhanced chemical vapor deposition (PECVD) is followed by a high temperature annealing step in order to remove hydrogen and to achieve low propagation losses in ...
The possibility of tailoring membrane surfaces with osteoconductive potential, in particular in biodegradable devices, to create modified biomaterials that stimulate osteoblast response should make them more suitable for clinical use, hopefully enhancing bone regeneration. Bioactive inorganic materials, such as silica, have been suggested to improve the bioactivity of synthetic biopolymers. An ...
Crystallographic structures, optoelectronic properties, and nanoscale surface morphologies of ex situ phosphorus-doped polycrystalline silicon (poly-Si)/SiOx passivating contacts, formed by different deposition methods (sputtering, plasma-enhanced chemical vapour [PECVD], low-pressure [LPCVD]), are investigated compared. Across all these technologies, we noted the same trend: higher diffusion t...
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