Nano- and micro-electromechanical systems (N/MEMSs) are traditionally based on electrostatic or piezoelectric coupling, which couples electrical mechanical energy through acoustic resonator structures. Most recently, N/MEMS devices magnetoelectrics gaining much attention. Unlike that rely an AC electric field voltage excitation, magnetoelecric the electromechanical resonance of a magnetostricti...

A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two deg...

Based on the superiority of piezoelectric elements, including lightweight, high electric mechanical transformation efficiency and a quick response time, piezoelectric-based micro-positioning actuator is developed in this investigation. For eliminating effects hysteresis modeling uncertainties that appeared actuator, nonlinear adaptive fuzzy robust control design with perturbation cancellation a...

For realization of micro fluid power sources applicable to microfactory or micromachines using fluid power with high power density, a resonantly-driven piezoelectric micropump with newly devised check valve unit is developed and a practical application to micro press is attempted. First, a micro sheet valve having a floating valve-body inside valve chest to increase valve-opening and to decreas...

The technique in artificial ultrasonic transducer using electronics is very bulky and power hungry. We switched over to ultrasonic Micro-Electronics Mechanical Systems (MEMS) which have shown significant importance for miniaturized mechanical system, based on silicon technology. MEMS based acoustic sensing transducers commonly employ the piezo-electric technology to interpret the received ultra...

In this article, a novel control method is proposed for feedforward compensation of hysteresis non-linearity in various frequency ranges. By integrating a multirate hysteresis compensator controller with PID feedback control, a combined controller is developed and experimentally validated for a piezoelectric micro-positioning system. Piezoelectric materials show non-linear hysteresis behaviour ...

Technology advancement that can provide new solutions and enable augmented capabilities to complementary metal–oxide–semiconductor (CMOS)-based technology, such as active and adaptive interaction between machine and human/ambient, is highly desired. Piezotronic nanodevices and integrated systems exhibit potential in achieving these application goals. Utilizing the gating effect of piezopotentia...

Title of dissertation: ADVANTAGEOUS UTILIZATION OF NONLINEAR PHENOMENA IN MICRO-STRUCTURES AND MACRO-STRUCTURES Andrew James Dick, Doctor of Philosophy, 2007 Dissertation directed by: Professor Balakumar Balachandran and Professor C. Daniel Mote, Jr. Department of Mechanical Engineering Within this work, the nonlinear oscillations of various beam-like structures are studied. Methods are develop...

We have developed a method of forming PZT films on silicon substrates with a high piezoelectric coefficient using RF sputtering. Films have been formed on 6-inch wafers with thickness variation of less than +/− 5% across the entire wafer. Our PZT film has an unusually high content of Nb dopant (13%) which results in 1.7-fold higher piezoelectric coefficient than sputtered PZT films previously r...

using piezoelectric patches the stress concentration around a hole on a plate under tension is reduced and controlled. to attain the reduction in stress two placements for piezoelectric patches is investigated. the first location is top/bottom of the hole with compression induced strain and the second is left/right of the hole with tension induced strains to control the stress flow. the result ...