In current AFM-based nanomanipulation systems, the commercial position closed-loop controller for piezoelectric nanopositioning stages are implemented with success in a wide range of industrial applications. Even if these controllers operate with satisfactory nominal tracking performance, considerable attention has been focused on appropriate control strategies to compensate hysteresis, nonline...

In current AFM-based nanomanipulation systems, the commercial position closedloop controller for piezoelectric nanopositioning stages are implemented with success in a wide range of industrial applications. Even if these controllers operate with satisfactory nominal tracking performance, considerable attention has been focused on appropriate control strategies to compensate hysteresis, nonlinea...

Controller design to compensate vibration, hysteresis and time delay in a high-speed serial-kinematic X–Y nanopositioner is presented in this paper. A high-speed serial-kinematic X–Y nanopositioner, designed in-house, is installed in a commercial AFM and its scanning performance is studied. The impediments to fast scanning are (i) the presence of mechanical resonances in the nanopositioning sta...

Ferroelectric and ferromagnetic materials are employed as both actuators and sensors in a wide variety of applications including fluid pumps, nanopositioning stages, sonar transducers, vibration control, ultrasonic sources, and high-speed milling. They are attractive because the resulting transducers are solid-state and often very compact. However, the coupling of field to mechanical deformatio...

Ferroelectric materials, such as PZT, PLZT and BaTiO3, are being considered, or are already being employed, for a large number of applications including nanopositioning, high speed valves for fuel injectors, ultrasonic transducers, high speed camera shutters and auto focusing mechanisms, energy harvesting, and pico air vehicle design. Their advantages include nanometer positioning resolution, b...

This paper presents a novel magnetically levitated (maglev) stage developed to meet the ever-increasing precise positioning requirements in nanotechnology. This magnetic levitator has 6 independent linear actuators necessary and sufficient to generate all 6-degree-of-freedom (6-DOF) motions. This minimum-actuator design concept led to a compact, 200 g lightweight moving part and the power consu...

Piezoelectric ceramic actuators have been widely used in nanopositioning applications owing to their fast response, high stiffness, and ability to generate large forces. However, the existence of nonlinearities such as hysteresis can greatly deteriorate the accuracy of the manipulation, even causing instability of the whole system. In this article, we have explained the causes of hysteresis bas...

Ferroelectric materials, such as PZT, PLZT, PMN and BaTiO3, provide unique actuator and sensor capabilities for applications including nanopositioning, high speed valves and fuel injectors, camera focusing and shutter mechanisms, ultrasonic devices for biomedical imaging and treatment, and energy harvesting devices. However, to achieve the full potential of the materials, it is necessary to dev...

This paper studies and analyses fundamental trade-offs between positioning resolution, tracking bandwidth, and robustness to modeling uncertainties in two-degree-of-freedom (2DOF) control designs for nanopositioning systems. The analysis of these systems is done in optimal control setting with various architectural constraints imposed on the 2DOF framework. In terms of these trade-offs, our ana...

In current AFM-based nanomanipulation systems, the commercial position closed-loop controller for piezoelectric nanopositioning stages are implemented with success in a wide range of industrial applications. Even if these controllers operate with satisfactory nominal tracking performance, considerable attention has been focused on appropriate control strategies to compensate hysteresis, nonline...