نتایج جستجو برای: enhanced atomic layer deposition

تعداد نتایج: 767218  

Journal: :Journal of Vacuum Science & Technology A 2019

Journal: :physica status solidi (RRL) - Rapid Research Letters 2018

Journal: :Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 2017

Journal: :Applied physics reviews 2022

Conductive and semiconductive oxides constitute a class of materials which the electrical conductivity optical transparency can be modulated through material design (e.g., doping alloying) external influences gating in transistor or gas exposure sensor). These (semi)conductive oxides, often categorized as amorphous oxide semiconductors transparent conductive have, therefore, been commonplace in...

2002
Matthias K. Gobbert Vinay Prasad Timothy S. Cale

We present a transient Boltzmann equation based transport and reaction model for atomic layer deposition ~ALD! at the feature scale. The transport model has no adjustable parameters. In this article, we focus on the reaction step and the postreaction purge steps of ALD. The heterogeneous chemistry model consists of reversible adsorption of a reactant on a single site, and irreversible reaction ...

2017
Casey R. Wade Chiranjib Banerjee Axel Soulet James McAndrew John A. Belot

The syntheses and characterization of both tris(diethylamino)aluminum and tris(diisopropylamino)aluminum are presented in this letter. Characterization includes vapor pressure measurements and comparison of the two non-pyrophoric precursors showing them to be viable alternatives to trimethylaluminum. Ultimately, tris(diisopropyl)aluminum was successful in the atomic layer deposition of alumina ...

2014
Ali Haider Cagla Ozgit-Akgun Fatma Kayaci Ali Kemal Okyay Tamer Uyar Necmi Biyikli

Journal: :Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 2012

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