It is well established that pad conditioning facilitates polish rate stability in chemicalmechanical polishing (CMP) of interlayer dielectic (ILD) silicon dioxide films and that in the absence of conditioning, polish rates decay over time [Stein et al., Lawing]. ILD rate decay is also associated with changes in pad surface morphology [Lawing, Kojima et al.]. In [Lawing], it was found that the p...

The charge collected from beta source particles in single pad detectors produced on p-type Magnetic Czochralski (MCz) silicon wafers has been measured before and after irradiation with 26 MeV protons. After a 1MeV neutron equivalent fluence of 1x10 cm the collected charge is reduced to 77% at bias voltages below 900 V. This result is compared with previous results from charge collection measure...

This paper presents the status of Monte Carlo simulation of one of the luminosity detectors considered for the future e + e − International Linear Collider (ILC). The detector consists of a tungsten/silicon sandwich calorimeter with pad readout. The study was performed for Bhabha scattering events assuming a zero crossing angle for the beams.

We have simultaneously fabricated RF power LDMOSFETs on thin-film SOI and bulk silicon wafers. This work compares their DC current–voltage ( – ), capacitance–voltage ( – ), -parameter, and 1.9-GHz load-pull characteristics and explains differences between them. The SOI LDMOSFET performance is shown to be largely similar to the performance of an equivalent bulk silicon LDMOSFET, but there are im...

Double-sided silicon detector prototypes produced for the CMS inner tracker are described which divide the n-side into pads rather than strips. The signal routing to the readout electronics is made on a separate flexible z-print which is glued on the detector and then wire-bonded to the pads.

We propose a new method for estimating the contact state of objects with varying shapes on a vision‐ based fluid‐type tactile sensor, which touch pad is an elastic transparent membrane of silicon rubber with dotted pattern printed on its inner side. The membrane is filled with translucent red colored water. The proposed method leads to better understanding of the...