Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...

This paper presents the numerical simulation results and the experimental investigations of a polymeric microgripper designed using the cascaded V-shaped electrothermal actuators. The microgripper was simulated using electro-thermo-mechanical finite element method (FEM) based on Coventorware 2014 software in order to check the performance of the gripper. As structural material of the microgripp...

This paper reports a monolithic, force-feedback MEMS (microelectomechanical systems) microgripper and its application to micro-scale compression testing of swollen hydrogel microcapsules at wet state during manipulation. The single-chip microgripper integrates an electrothermal microactuator and two capacitive force sensors, one for contact detection (force resolution: 38.5 nN) and the other fo...

ames K. Mills illiam L. Cleghorn niversity of Toronto epartment of Mechanical and Industrial Engineering King’s College Road oronto, Ontario M5S 3G8, Canada Abstract. This paper introduces a visual-servoing system used in the automation of microelectromechanical system microassembly. In the proposed system, small microparts, 20 m wide and 2 m thick, are automatically grasped using a passive com...

The Fourier Transform (FTIR) microspectrometer discussed in this paper is an example of a complex Micro-OptoElectro-Mechanical System (MOEMS) configured as an optical bench on a chip. It is an important benchmark application for microtechnology due to increased demands for the use of miniature wavelength detection instruments in bio, nano and material science. This device can be manufactured us...

This paper presents design, fabrication, and characterization of easy-to-handle electroplated nickel microgrippers with SU-8 adaptors for heterogeneous micro/nano assembly applications. Two distinctive designs of microgrippers as end-effectors of micro/nano assembly applications have been developed in this work. The first design is 200 lm thick electroplated nickel microgripper with a plastic m...

Over the last few years the demand for miniature objects and devices has continuously increased. So the need for MEMS (Micro Electro Mechanical Systems) and MOEMS (Micro Opto Electro Mechanical Systems) in various fields has become more and more important. New micromanipulation technologies must be developed that take into account the specificities of MEMS and MOEMS. For performing manipulation...

There are great challenges in biological research to study mechanical or chemical interactions between biological objects and artificial parts, to analyse the biocompatibility of artificial materials and/or to increase knowledge about biological cells. Some interaction studies between cells and artificial objects require to positioning very small objects whose typical size is comparable with ce...