This paper focuses on the development of a complete model of an atomic force microscope (AFM) micro-cantilever beam, based on considering the effects of four major factors in modeling the cantilever. They are: rotary inertia and shear deformation of the beam and mass and rotary inertia of the tip. A method based on distributed-parameter modeling approach is proposed to solve the governing equat...

The static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. Two engineering cases including cantilever and double cantilever micro-beam are considered. Considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent Euler-Bernoulli beam model is used based on a modified couple stress theory, c...

In this paper, we present the fabrication and packaging of a cantilever-based airflow sensor integrated with optical fiber. The sensor consists of a micro Fabry-Perot (FP) cavity including a fiber and a micro cantilever that is fabricated using the photolithography method. Airflow causes a small deflection of the micro cantilever and changes the cavity length of the FP, which makes the fringe s...

Energy harvester is a self-generating energy source which is able to run small scale electronic devices. It largely reduces the dependency on external power source. This paper represents the utilization of micro cantilever beam to develop a vibration based electromechanical systems (MEMS) piezoelectric energy harvester system. The proposed micro cantilever part has been developed by finite elem...

The image quality and resolution of the Atomic Force Microscope (AFM) operating in tapping mode is dependent on the quality (Q) factor of the sensing micro-cantilever. Increasing the cantilever Q factor improves image resolution and reduces the risk of sample and cantilever damage. Active piezoelectric shunt control is introduced in this work as a new technique for modifying the Q factor of a p...

Nowadays, atomic force microscope is considered as a useful tool in the determination of intermolecular forces and surface topography with the resolution of nanometers. In this kind of microscope, micro cantilever is considered as the heart of the microscope and is used as a measuring tool.  This paper is aimed towards investigating the behavior of a piezoelectric micro cantilever with a triang...

In this paper, a novel analysis was carried out on the biosensor microcantilevers in order to increase the sensitivity of a microcantilever based biosensor piezoresistive. Holes were made and compared with the basic rectangular (R), triangular (T), and step(S) profile cantilever. Effect of changing the micro-cantilevers profile and its cross-section shape was investigated. A finite element ANSY...

A dynamic method for mass detection, considering attaching positions of micro-objects on microcantilevers, is introduced. Two models based on the Rayleigh– Ritz method were developed for analyses of the first flexural and the first torsional modes of a “cantilever– mass” system, respectively. Due to one-to-one correspondence between the longitudinal adhering positions of the micro-objects and t...

Measurement of gas density and viscosity was conducted using a micro-cantilever beam. In parallel, the validity of the proposed modeling approach was evaluated. This study also aimed to widen the database of the gases on which the model development of the micro-cantilever beams is based. The density and viscosity of gases are orders of magnitude lower than liquids. For this reason, the use of a...

107106-6464 IJET-IJENS © December 2010 IJENS I J E N S Abstract— Capacitive cantilever-mass micro-machined accelerometers have attracted much interest for properties such as a simple structure and potentially high sensitivity. This paper presents the simulation of a low-g capacitive cantilever-mass micro-machined accelerometer model to gain the desirable magnitude of displacement and capacitanc...