In this work, electrothermal microgrippers designed using topology optimization are modeled. The microgrippers are composed of two 5 μm-thick polysilicon actuators facing each other. The gap between the actuators are 2 μm in the initial state and the microgrippers are able to both fully close and further open this gap. The operation principle of the actuators is quite similar to that of a paral...

The design, characterization and control of a novel 2-DoF MEMS nanopositioner is presented, with Z-shaped electrothermal actuators being used to position the device’s central stage. Whereas the more commonly-used V-shaped electrothermal actuator only allows displacements in one direction, the design of the Z-shaped beams used in the presented device allows two actuators to be coupled back-to-ba...

A new geometry of high-force electrothermal actuator is demonstrated using microelectromechanical systems technology. The actuator consists of two sets of inclined, parallel, suspended beams, which are tethered at one end and linked together at the other. The first set is divided into two halves, which are connected in series and heated electrically. The second set acts as a tether for the firs...

Microsystems using electrothermal bent-beam microactuators have been demonstrated for a variety of applications including optical attenuators, RF switches, and micro positioners for scanning microscopy, creating an important need for information on the longevity of these devices. This paper reports on the lifetime pulse testing results of polysilicon actuators. Devices have been operated up to ...

We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is act...

Electrothermal actuation is widely employed in MEMS systems, and the electrothermal V-shaped actuator (referred to as EVA) has garnered attention due its stable output force. However, current EVAs face challenge of limited driving displacement. To investigate impact metal coating on displacement silicon EVAs, a mechanical model established, formula for calculating maximum derived. The theoretic...

A modified tuning element for a Littrow external cavity laser is demonstrated using microelectromechanical systems technology. The device combines a vertically etched blazed grating, a compound flexure suspension and drive elements for translating and rotating the grating. Tuning is linearized by linking the grating to a remote actuator by a flexible linkage. A simple theoretical model of the l...