نتایج جستجو برای: titanium nitride thin film reactive sputtering

تعداد نتایج: 388612  

Esmaeil Zaminpayma

The most commonly used method for the production of thin films is based on deposition of atoms or molecules onto a solid surface. One of the suitable method is to produce high quality metallic, semiconductor and organic thin film is Ionized cluster beam deposition (ICBD), which are used in electronic, robotic, optical, optoelectronic devices. Many important factors such as cluster size, cluster...

2012
Icpyo Kim Tae-Hyun Nam Ki-Won Kim Jou-Hyeon Ahn Dong-Soo Park Cheolwoo Ahn Byong Sun Chun Guoxiu Wang Hyo-Jun Ahn

LiNi0.4Co0.3Mn0.3O2 thin film electrodes are fabricated from LiNi0.4Co0.3Mn0.3O2 raw powder at room temperature without pretreatments using aerosol deposition that is much faster and easier than conventional methods such as vaporization, pulsed laser deposition, and sputtering. The LiNi0.4Co0.3Mn0.3O2 thin film is composed of fine grains maintaining the crystal structure of the LiNi0.4Co0.3Mn0....

2015
Konstantinos D. Bakoglidis Susann Schmidt Magnus Garbrecht Ivan G. Ivanov Jens Jensen Grzegorz Greczynski Lars Hultman

Konstantinos D. Bakoglidis, Susann Schmidt, Magnus Garbrecht, Ivan G. Ivanov, Jens Jensen, Grzegorz Greczynski and Lars Hultman, Low-temperature growth of low friction wear-resistant amorphous carbon nitride thin films by mid-frequency, high power impulse, and direct current magnetron sputtering, Journal of Vacuum Science & Technology. A, 2015, 33(5), 05E112 . http://dx.doi.org/10.1116/1.492327...

Journal: :Physical review letters 2012
E F C Driessen P C J J Coumou R R Tromp P J de Visser T M Klapwijk

We probe the effects of strong disorder (2.4<k(F)l<8.6) on superconductivity in thin films of niobium titanium nitride and titanium nitride by measuring the microwave electrodynamics in coplanar waveguide resonators. We find a gradual evolution of the electromagnetic response with disorder, deviating from BCS theory, for both materials. This result can be understood as due to changes in the qua...

Journal: :Nihon Sozai Bussei Gakkaishi 2022

The superparamagnetic thin films with a granular structure show characteristic magnetization curve. In this study, Co-Al2O3 were fabricated by the sputtering method normal DC source for Co deposition, RF Al2O3 and pulsed reactive used fabrication of non-magnetic matrix oxide or nitride Al Si. As result, high could be obtained deposition rate. Very rate was Si using method. This 5 times larger t...

2012
Varvara Karagkiozaki Panagiotis G Karagiannidis Nikolaos Kalfagiannis Paraskevi Kavatzikidou Panagiotis Patsalas Despoina Georgiou Stergios Logothetidis

BACKGROUND Nanomedicine has the potential to revolutionize medicine and help clinicians to treat cardiovascular disease through the improvement of stents. Advanced nanomaterials and tools for monitoring cell-material interactions will aid in inhibiting stent thrombosis. Although titanium boron nitride (TiBN), titanium diboride, and carbon nanotube (CNT) thin films are emerging materials in the ...

Journal: :Biomedical materials 2007
A Mello Z Hong A M Rossi L Luan M Farina W Querido J Eon J Terra G Balasundaram T Webster A Feinerman D E Ellis J B Ketterson C L Ferreira

Right angle magnetron sputtering (RAMS) was used to produce hydroxyapatite (HA) film coatings on pure titanium substrates and oriented silicon wafer (Si(0 0 1)) substrates with flat surfaces as well as engineered surfaces having different forms. Analyses using synchrotron XRD, AFM, XPS, FTIR and SEM with EDS showed that as-sputtered thin coatings consist of highly crystalline hydroxyapatite. Th...

2004
C. Casiraghi H. Hilgers

Storage density is presently doubling every year. This requires the read head to approach closer to the magnetic layer, and ever-thinner layers of carbon. Film thickness below 2 nm and roughness well below 1 nm are needed for the storage of ;1 Tby in . Here we present an analytical and functional characterisation of ultra-thin carbon nitride and pure carbon films produced by 2 magnetron sputter...

Journal: :Inorganic chemistry 2011
Inseok Seo Steve W Martin

In this study, lithium thio-germanate thin film electrolytes have been successfully prepared by radio frequency (RF) magnetron sputtering deposition in Ar gas atmospheres. The targets for RF sputtering were prepared by milling and pressing appropriate amounts of the melt-quenched starting materials in the nLi(2)S + GeS(2) (n = 1, 2, and 3) binary system. Approximately 1 μm thin films were grown...

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